Used TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI #9381823 for sale
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ID: 9381823
Wafer Size: 12"
Vintage: 2012
Furnace, 12"
Process: HFSiOX
Type: LPCVD
Rapid cooling unit
Pump box
Power box
VMM-56-201 Heater
FUJIKIN Air valve
MFC, MFM: AERA
MAIN / APC: CKD
Load lock system
GFC Display
Load port: Side FFU
FIMS Port
Wafer transfer
(2) Boat systems KAWASAKI
Heater type:
VMM-56-201 Low temp
(4) Zones: 150°C~600°C
Furnace subsystem:
Automation system
Heater
Process chamber
Temperature controller
Scavenger
Cooling water unit
Gas subsystem:
Gas supply unit
Exhaust
Vacuum line
Gas:
N2
Ar
O3
3-DMASi (Liquid)
H2O and TDMAH (Source tank)
Missing parts:
(2) Hard Disk Drives (HDD)
QUARTZ Wares
Manifold accessory
Power supply: 3 Phase, AC 480 V, Single phase, AC 120 V
2012 vintage.
TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is a diffusion furnace and accessories designed for efficient semiconductor device fabrication. This equipment is used to deposit dopants in the epitaxial layers during IC processing. It has a vertical structure to enable maximum temperature uniformity, as well as an integrated exhaust manifold to reduce contamination. The unit includes a programmable microprocessor and an active interlock system to ensure safe operation. TEL Indy Plus-B-MVCKNNRRTXI is equipped with industry-standard features that make the unit ideal for efficient epitaxial layer production in the semiconductor fabrication process. It features a programmable temperature/time control with new optimized algorithms for maximum precision and accuracy. The machine's temperature range has been expanded with the addition of a multi-zone controller. The tool also provides an adjustable process pressure to optimize the growth of the epitaxial layer. TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI diffusion furnace features an auto-prefix gas delivery asset that automatically adds margin dosing to maintain steady source gas concentrations. Its automated purge model removes unwanted gas before the next run to assure highly repeatable results. In addition, the real-time gas monitoring and analysis equipment can monitor multiple gases for precise feedback and control. Indy Plus-B-MVCKNNRRTXI offers precise process monitoring and control by providing an intuitive user interface, process data feedback, and adjustment capabilities. The comprehensive data logging system allows full traceability and immediate access to data. The batch logging and integration capabilities offer efficient data management and recall features. TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is designed to be compatible with a variety of expansion cards and upgrades, allowing for personal customization and future expansion. This unit also meets all industry standards for safety and features an adjustable process control machine with built-in leak detection sensors. With its efficient design, high operating performance, and safety features, TEL Indy Plus-B-MVCKNNRRTXI is a reliable choice for semiconductor fabrication and epitaxial layer production.
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