Used TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI #9381830 for sale
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ID: 9381830
Wafer Size: 12"
Vintage: 2010
Furnace, 12"
Process: HfSiOx
Heater type:
VMM-56-201 Low temp
(4) Zones: 150°C~600°C
Gas:
N2
Ar
O3
3-DMASi (Liquid)
H2O and TDMAH (Source tank)
(2) Boat systems KAWASAKI
Hard Disk Drive (HDD)
2010 vintage.
TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is a next-level diffusion furnace designed to accommodate the latest advancements in substrate handling and processing technology. It provides both process repeatability and yield improvement for the highest quality device performance. With its advanced technology, TEL Indy Plus-B-MVCKNNRRTXI is capable of processing a wide variety of materials including metals, ceramics, semiconductors, and composites. TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is equipped with two advanced furnaces, both using vertical and horizontal convection. The vertical furnace is driven by a multi-axis system which utilizes independently driven conveyor rollers and rotary actuators to move the wafer to an optimal diffusion temperature. The horizontal furnace draws the wafer into the heated chamber from either end, allowing precise control over radiation and convection heating. Indy Plus-B-MVCKNNRRTXI furnace comes standard with a state of the art Peltier cooling system. This features an advanced image-processing system that regulates probe current for uniform temperature across the whole wafer. With a multi-point temperature probe, TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI allows for measurements of extreme precision across the whole wafer and can be operated with up to 4 independent temperature zones. The furnace can also be programmed to perform processes to a preset temperature profile. In addition, TEL Indy Plus-B-MVCKNNRRTXI also comes with Active temperature control software that enables users to define their own heating and cooling curves. This software is equipped with a self-learning algorithm to constantly improve data accuracy and repeatability. The software also powers the furnace's automatic error handling, enabling engineers to quickly adjust or fix any process errors. TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is also complemented by a range of advanced accessories. This includes an auto-capture bay which allows for easy sample handling and automated process recipes for quick set-up. Indy Plus-B-MVCKNNRRTXI also features programmable process parameters such as pressure, temperature, and speed for targeted peak performance. TEL / TOKYO ELECTRON Indy Plus-B-MVCKNNRRTXI is the pinnacle of diffusion furnaces. With its automated controls and precision electronics, it offers reliable performance and precise measurements while also being easy to set up and operate. With its comprehensive accessories, it can be used to tackle a wide range of projects, making it a worthwhile investment for fabricators who value superior efficiency and quality.
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