Used TEL / TOKYO ELECTRON Indy Plus #9315271 for sale

TEL / TOKYO ELECTRON Indy Plus is an etcher/asher designed for use in semiconductor manufacturing. It is an advanced etch platform based on a process module platform that contains multiple chambers and a wafer transport system. TEL INDYPLUS model can be used as an asher and etcher and can be operated with different parameters to match the various needs of precision etch processing for semiconductor devices. TOKYO ELECTRON INDY PLUS provides a high throughput 100mm processing with heat run-up to 850℃ with outputs ranging from 50-350W. This allows for optimal utilization for substrate production at the desired temperature. TEL / TOKYO ELECTRON INDYPLUS also has a target substrate uniformity of +/-43.5 nm over the surface. It features an automated interlock and safety features, including an optic sensor that monitors the wafer temperature, a high resolution background monitor, and an armor guard to protect personnel from potential radiation and other hazards. TOKYO ELECTRON Indy Plus utilizes CVD etch technology. This technology is used to etch thin film layers of silicon, oxide, nitride, and other materials. It is capable of producing high-resolution, deep and uniform trenches with a single mask and repeatable results from wafer to wafer. TEL INDY PLUS has several specialized processes. It is capable of capturing particle profiles with monodispersive cleaning processes, improving lithography patterning results with plasma enhancing processes, and annealing surfaces to reduce etching damage. INDY PLUS also offers a gas delivery system that allows for quick process setup and stable etch processes. TEL Indy Plus can handle different wafer sizes and types. It is capable of processing substrates up to 200mm in diameter and a maximum wafer weight of 1.5kg. It is also able to handle sensitive and expensive substrates such as sapphire and oxide wafers. TEL / TOKYO ELECTRON INDY PLUS also has a graphite stage and chuck for reducing temperature variation, a low-leak, low-pressure carrier, and an RF generator for process control. INDYPLUS has excellent process quality capabilities. It has features such as bypass frequency control, limiting frequency control, and an oscilloscope function. It also offers an array of light source configurations for improved imaging, along with sophisticated vision software that detects line width variations, etch rate variations, and contamination. Indy Plus etcher/asher is a powerful and advanced etch processor for precision-etch processing of semiconductor devices. It can provide fast and reliable etching of the most delicate and difficult substrates. TOKYO ELECTRON INDYPLUS is ideal for etching processes such as silicon, oxide, nitride, HF, CF, and photoresist. It has an array of features such as high throughput, high-resolution etching and uniformity, various substrate sizes and types, a gas delivery system, and sophisticated vision software for improved imaging.