Used TEL / TOKYO ELECTRON Indy Plus #9353402 for sale
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ID: 9353402
Wafer Size: 12"
Vintage: 2013
Furnace, 12"
CIM: SECS GEM
Process: SIBCN
KHI Handler system
Factory interface: (4) FOUPs
Option: RCU 208VAC UPS
2013 vintage.
TEL / TOKYO ELECTRON Indy Plus is an advanced etcher / asher solution designed to provide manufacturers with high-performance, cost-effective processing and manufacturing capabilities. TEL INDYPLUS is capable of processing a wide range of materials and components in a variety of industries. From semiconductors to pharmaceuticals, TOKYO ELECTRON INDY PLUS' precise design allows for detailed, repeatable etch / ash processes that maintain exceptional consistency and accuracy. TEL Indy Plus is equipped with high precision linear actuator technology and the latest industry-leading process control systems, such as TEL automation equipment. This system enables users to monitor and control their process from any location with a secure internet connection. The unit is also capable of analyzing data, tracking performance, and automating processes to reduce processing time and error. TEL / TOKYO ELECTRON INDY PLUS offers high-end throughput and accuracy. The etch/ash process is managed by a powerful, low-decibel turbomolecular pump machine that allows for precise control over the etch/ash process, ensuring that the process is completed efficiently and with repeatable accuracy. TEL INDY PLUS' built-in humidity and gas-flow sensors ensure that all components and materials are processed with the exact parameters required for the process. For safety and convenience, TOKYO ELECTRON Indy Plus utilizes an Emergency Stop tool that automatically stops the etch/ash processes for any unexpected emergencies. Indy Plus also utilizes a protective window cover to provide a layer of protection against plasma and reactant gases. TOKYO ELECTRON INDYPLUS also offers a variety of etch/ash modes, including AUTO mode, which monitors the etch/ash process more closely and allows for optimized performance, and Manual mode for increased customization and control. TEL / TOKYO ELECTRON INDYPLUS is also equipped with a variety of processing aids, including a Recipe Makes Life Easier (RMLE) asset, which allows users to store various etch/ash processes for later use, and a Time-Rated (TR) Mode that ensures that etch/ash operations occur as efficiently as possible. Overall, INDY PLUS is an advanced etcher / asher solution designed to provide manufacturers with high-performance, cost-effective processing and manufacturing capabilities. Utilizing advanced linear actuator technology, process control systems, and an array of etch/ash modes and processing aids, INDYPLUS is an excellent choice for those seeking an advanced etch/ash solution.
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