Used TEL / TOKYO ELECTRON IW-6 / Alpha 8S/8SE #293658183 for sale

TEL IW-6 /Alpha 8S/8SE is a diffusion furnace and its peripheral components. It is primarily used in the electronics industry for applications such as semiconductor device fabrication, photovoltaics and optoelectronics. It is designed to deposit, anneal, oxidize or etch substrates in a controlled environment using either direct current (DC) or radio frequency (RF) plasma sources. The IW-6 /Alpha 8S/8SE is composed of the main chamber, controller, support equipment, power source, and a chamber pressure control equipment. The main chamber is made of stainless steel alloys and is designed to withstand high temperature and gas flow pressures. It features an easy-to-use, touchscreen controller which allows for easy operation and setting of parameters such as pressure, temperature, and gas flows for different applications. The temperature range is from room temperature to up to 1,200°C with a processable area of 177mm and a maximum substrate size of 350 x 250mm. An additional feature of this furnace is the incorporation of process atmosphere conditioning & air shower system. This includes a set of valves which select and control the atmosphere in the main chamber during different processing stages. It also features an ultra-high purity Ar source which is used to purge the chamber of inert gases and maintain a clean process environment. Additionally, the IW-6 /Alpha 8S/8SE is equipped with an RF plasma source for etching and seeding applications. The chamber pressure control unit is composed of an automated gauge monitor and a mass flow controller, which are used to accurately measure and control the pressure range in the main chamber. Additionally, an eye marker machine is installed inside the main chamber, which ensures that the substrates are properly positioned before processing. The IW-6 /Alpha 8S/8SE is a reliable and efficient tool for various applications in the electronics industry. It features a range of safety and process control features, which ensure that it runs to its optimum performance. In addition, it is CE approved and TUV certified, giving users peace of mind that their applications will run without any issues. This tool is also highly versatile, capable of performing a variety of processes such as deposition, annealing, oxidation, and etching. It is easy to install and use, enabling quick turnaround times for users without needing to wait for complex engineering installations. As a result, TOKYO ELECTRON IW-6 /Alpha 8S/8SE is an excellent option for users seeking a high-performance diffusion furnace and peripheral components. This tool offers a range of features and safety controls, making it a reliable and efficient tool for various electronics industry applications.