Used TEL / TOKYO ELECTRON IW-6 #9226342 for sale

TEL / TOKYO ELECTRON IW-6
ID: 9226342
Wafer Size: 5"
Vintage: 1994
Furnace, 5" 1994 vintage.
TEL / TOKYO ELECTRON IW-6 is a diffusion furnace and accessory designed to assist with processing semiconductor wafers. The diffusion furnace features a secondary zone design that allows for improved thermal uniformity and low thermal gradients. It has an attached gas panel with six inlets for controlling the flow of gases during the diffusion process. The furnace also features a temperature-controlled line-changer and an optional automatic load lock. The equipment utilizes two dual-element heaters and a low-thermal-gradient heating chamber to achieve a uniform temperature profile. The quaternary heating system is designed to reduce the thermal gradient and is equipped with a maximum temperature of 1350°C. It is also equipped with a cooling unit for rapid cooling when necessary. The diffusion furnace is powered by a MOSFET-based ramp module and is controlled using an easy-to-use operator interface. The furnace includes a high-precision data acquisition machine that can be used to measure the progress of the diffusion process. The data taken can be stored for reference and used for continuous improvement. Safety features such as a delayed heating start-up and automated safety shut-off are included to prevent overheating or excessive temperatures. The tool has a modern control asset with remote diagnostic capability. It is also equipped with a fail-safe protective model that activates in the event of a process failure. TEL IW-6 Diffusion Furnace is a reliable, high-performance apparatus for performing semiconductor diffusion. It is a tool of choice for many semiconductor fabrication facilities. Its temperature controls, safety functions, and data-acquisition capabilities make it an excellent choice for processing electronic components.
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