Used TEL / TOKYO ELECTRON IW-6D #195915 for sale

TEL / TOKYO ELECTRON IW-6D is an advanced diffusion furnace and accessory specifically designed for providing high-precision plasma-enhanced chemical vapor deposition (PECVD). TEL IW-6D is composed of a specialized stainless steel vacuum chamber and powerful plasma source with flexibly configurable cathode and gas delivery systems. TOKYO ELECTRON IW-6D features a 2.6-inch diameter by 12.5-inch long monocrystal quartz tube vacuum chamber. The tube chamber is comprised of two half-cylindrical vented titanium housing and two flanges, each with four dowel pins sealed with O-rings. The quartz tube is electrically conductive and is coated with pure aluminum to prevent arcing along the tube walls. Additionally, the tube is surrounded by a double-layer of aluminum blocks and contains embedded heaters for uniform thermal cycle optimization. IW-6D houses a standard RF power source with a manually adjustable mode, allowing the user to tailor settings precisely for the desired plasma processing. The device provides a total of 30 kilowatts of power for plasma formation and three sets of 18.6 kW for PID temperature control during PECVD processing. Further features of the power source include a TEL-GENLOW III power supply board, support bar structure, a closedized torch electrode and an active hydrogen alarm equipment. TEL / TOKYO ELECTRON IW-6D gas delivery system is composed of a 4-way gas manifold and five gas flow controllers, enabling the user to place a wide range of gases into plasma processing. The manifold has a total capacity of 300 liters/min, and can precisely control flow rate between 0 to 300 sccm. This unit supports the delivery of four ceramic process gases for use in plasma enhanced deposition processes. In addition, TEL IW-6D offers the opportunity for integration with a range of advanced accessories for supported process applications. High-end options include a special gas cooler, an automatic gas mixing machine, a cryogenic cooling tool, an in-situ molecular reactant asset and an auto-purge model. Users also have the option of configuring TOKYO ELECTRON IW-6D with a desktop remote control console, allowing it to be controlled from a safe distance. This heavy-duty advanced precision diffusion furnace and accessory proves reliable, robust and user-friendly, making it ideal for applied research laboratories. IW-6D provides direct control of all crucial plasma processing parameters in a single unit, allowing it to cover a wide range of applications, including CVD, PECVD, etching, deposition and more. With the added option of customizing TEL / TOKYO ELECTRON IW-6D with a range of advanced accessories, it is no wonder this product is highly sought after.