Used TEL / TOKYO ELECTRON IW-6D #293798922 for sale

TEL / TOKYO ELECTRON IW-6D is a diffusion furnace and accessories designed specifically for high performance diffusion processes. The 200mm x 300mm vertical heater string with 3 zones—vertically adjustable from the top—delivers uniform temperature control on up to 3 wafers simultaneously. The low thermal gradient across the furnace enables high quality layer formation and low sublimatedCl rates, and the reduced thermal-emission characteristics of TEL IW-6D ensure high throughput of wafers in the process. TOKYO ELECTRON IW-6D is equipped with common process simulation functions including adjustable back-pressure, gas purity, gas distribution, gas flow rate and gas pressure. The gas analysis system is integrated with IW-6D providing both real-time analysis for online process review and adjustment as well as post-collection off-line process analysis. It has an adjustable gas inlet-swirl device for a uniform gas distribution and an adjustable back-pressure regulator for optimal process control. In addition, TEL / TOKYO ELECTRON IW-6D is designed with an adjustable ramp rate allowing for rapid temperature surveys between set points, and a low rate controlled shut down through the cooling zone, preventing wafer degradation through excess heat soak time. It also offers a uniform thermal gradient by using multiple H-mode heaters. All of these features contribute to the high quality and best-in-class performance of TEL IW-6D. TOKYO ELECTRON IW-6D is also capable of reproducing a variety of design rules in its process chamber and providing complete reproducibility of critical processes. Its automated process controller provides the capability to reproduce a variety of design rules in the technical and repeatable manner required in the semiconductor industry. Additionally, IW-6D is equipped with an integrated quartz viewport and wafer alignment door allowing the user to check the alignment and verify the process conditions. TEL / TOKYO ELECTRON IW-6D also provides multiple process and tool monitoring capabilities via the Ethernet monitoring service for secure remote service and control from the user's site. This support includes diagnostics, local indicator display, plus hardware and software monitor and control. Finally, TEL IW-6D comes with safety features such as safety interlock and emergency shutdown. Its safety information is visible and accessible for smooth operation when required. In conclusion, TOKYO ELECTRON IW-6D is a diffusion furnace and accessories designed to provide high throughput, high quality layer formation, and repeatable high performance processes. It is equipped with superior process simulation functions, adjustable ramp rates, low thermal gradient, gas analysis system, automated process controller, integrated quartz viewport, and various safety features for reliable and consistent operation. It is the ideal tool for applications requiring exceptional layer formation and the highest repeatability.