Used TEL / TOKYO ELECTRON IW-6D #293798924 for sale

TEL / TOKYO ELECTRON IW-6D is a diffusion furnace and accessory manufactured by TEL. It is a high efficiency, high quality furnace for heat treatments and diffusion processes for semiconductor device fabrication. It has a temperature range of 200°C to 1400°C and can be used for annealing, bonding, SiGe deposition, and penetration. It features an TEL IW-6D hollow cathode furnace, which can perform high temperature reaction smoothly and accurately with high efficiency, enabling complex diffusion process systems to be handled seamlessly. TOKYO ELECTRON IW-6D can treat a wide variety of materials, such as silicon, germanium, and other CVD materials, as well as oxides and nitrides, and is suitable for small to large production runs. It is designed to be highly adaptable, allowing for a broad range of process parameters and atmosphere control. In addition, it has a wide variety of accessories available, such as IW-6D backside platen, which can be used to precisely control heating and diffusion of samples with different surface treatments. TEL / TOKYO ELECTRON IW-6D also features a wide range of features to increase safety, including temperature alarms, lockout/emergency stop, and over temperature control. It also has a unique gas purge system for reducing oxide formation on the furnace components. It is also equipped with an active nitrogen atmosphere control system, ensuring that the desired atmosphere is maintained during processing. TEL IW-6D is a cost-effective solution for semiconductor device fabrication and wafer bakeout. It is built for reliability and offers a wide range of features for improved safety, accuracy, and efficiency. It can be used for various applications, such as annealing, bonding, CVD deposition, and wafer baking. It is an ideal solution for difficult and complex process systems.