Used TEL / TOKYO ELECTRON M560A #293597892 for sale

TEL / TOKYO ELECTRON M560A is an advanced diffusion furnace and accessories for semiconductor device manufacturing. This innovative equipment is designed for high performance, maximum efficiency and highest temperature uniformity to enable accurate measurements on intricate structures such as nanowires. It consists of a furnace chamber and an accompanying set of accessories such as a vacuum/cooling chamber, quartz plate, susceptor, wafer holder, and pressure sensors. The furnace chamber has two sections. The upper section houses the heating element, the thermocouples, and a mirror to provide top-down radiation heating to enhance temperature uniformity. The lower section consists of a gas inlet, pumping unit, and temperature sensors. This enables the equipment to accurately measure and maintain independent temperature settings, as well as providing additional thermal control in a sealed environment. The accompanying accessories are made of quartz to ensure high thermal shock resistance and long-term stability. The quartz plate serves as the base where the samples are placed, while the susceptor carries the sample across the heating zone. The wafer holder provides a stable platform for the wafer with its adjustable spring tension. The pressure sensors help the system maintain an optimal pressure for uniform gas distribution. TEL M560A adopts a comprehensive heating mechanism, which combines both top-down and bottom-up radiation heating. With this superior method, the unit can provide unprecedented temperature uniformity in the process, requiring only a single power supply setting to maintain desired levels. The diffusion furnace is also equipped with a built-in air cooling machine to provide rapid cooling of samples on completion. In terms of safety, TOKYO ELECTRON M560A follows strict guidelines to ensure the highest possible safety and operational standards. The tool offers various safety interlocks to protect against excessive temperatures, as well as door controls to prevent unexpected operation. In addition, an innovative water cooling asset prevents the model from overheating and provides added safety for users. Overall, M560A is an advanced diffusion furnace and accessory equipment that provides exceptional temperature uniformity and control for complex semiconductor device manufacturing tasks. The system offers unparalleled accuracy and reliability, with sophisticated safety features and a superior heating unit. This innovative equipment is designed to deliver the highest performance levels, enabling manufacturers to produce the highest quality results.