Used TEL / TOKYO ELECTRON TELINDY Plus-I-M #293595800 for sale
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ID: 293595800
Wafer Size: 12"
Vintage: 2009
Vertical LPCVD furnace, 12"
CIM: SECS-GEM
Process: LTO Oxide
(2) FOUPs
KHI Handler system
Rapid cooling unit
UPS
208 VAC
Gas detection box
2009 vintage.
TEL / TOKYO ELECTRON TELINDY Plus-I-M is a diffusion furnace and accessories designed and manufactured by TEL. This diffusion furnace is designed for production of thin-film deposition, doping, and drive-in processes and is the ultimate tool for advanced R&D and industrial thin-film processes. TEL TELINDY Plus-I-M diffusion furnace uses an inductive coupling-type technology to generate uniform temperatures up to an impressive 950°C. This diffusion furnace also features a quartz-glass heating chamber to ensure maximum safety when working with extremely high temperatures. With a maximum pressure of 600 Torr, TOKYO ELECTRON TELINDY Plus-I-M diffusion furnace can handle any diffusion driven application. This diffusiion furnace is also equipped with a automatic control device, which allows for accurate and predictive controlling of each process safely and efficiently. TELINDY Plus-I-M also includes a variety of accessories, including a gas control equipment, a gas phase reactant supply system, a temperature measuring unit, and a vacuum inverter, further helping to create a stable processing environment. To keep operators safe during operation, TEL / TOKYO ELECTRON TELINDY Plus-I-M features an external over-temperature and ground fault interlock machine which helps eliminate any unexpected increases in temperatures or electrical anomalies. It also features a multiple-trap design that provides both cold and hot traps for improved collection efficiency as well as superior levels of safety. TEL TELINDY Plus-I-M diffusion furnace is designed to meet the highest production demands for precision control of fine features and temperature uniformity. With its precisely-controlled heating and cooling, short processing times, and superior safety features, this diffusion furnace is an ideal choice for those working in advanced industrial thin-film processes.
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