Used TEL / TOKYO ELECTRON UHO-2505 #9112862 for sale
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TEL / TOKYO ELECTRON UHO-2505 is a diffusion furnace designed for specialised film deposition applications. It is a vertical furnace with a top-to-bottom openable lid and a maximum temperature range of up to 1100 degrees Celsius. It is equipped with a rectangular-shaped inner quartz susceptor that ensures even heating inside the chamber and prevents contamination from outside sources. The furnace is equipped with a high-performance controller that allows the user to program the temperature profile, time duration for each step, ramp rate, and other variables. It also supports both manual and automatic operation, making it suitable for a variety of laboratory applications. The system is also equipped with two independent PID controllers for precise temperature control and continuous measurement of pressure and temperature. The inner part of TEL UHO-2505 consists of a graphite susceptor tray, a heating element, and equipment for handling gases. The heating element is designed to ensure uniform temperatures in the furnace chamber while maintaining low thermal gradients. The graphite susceptor tray enables uniform temperature distribution and efficient wafer processing. Accessories for TOKYO ELECTRON UHO-2505 include an exhaust fan and venturi manifold for efficient gas exhaust and an RF impedance matching network for controlling plasma density. The user can also install a proportional valve in the exhaust line to automatically control the pressure inside the furnace. UHO-2505 is a reliable and durable diffusion furnace that is suitable for a range of laboratory applications. Thanks to its compact design, the furnace can be installed in a variety of locations and is easily transportable. The high-performance controller and accuracy of temperature control ensures that the furnace can produce high-quality results. Its robust construction and accessories make it an ideal choice for diffusion furnace applications.
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