Used TEL / TOKYO ELECTRON UL-2604-08-HS #9226258 for sale

TEL (TOKYO ELECTRON) TEL / TOKYO ELECTRON UL-2604-08-HS offers unmatched diffusion furnace & accessory performance. This model is designed for advanced semiconductor applications and is ideal for a variety of ultra-low temperature processes. It is a single thermal zone equipment equipped with a 4-inch, 25-position cassette head and an 8-inch quartz heater. The thermal zone is designed for controlling and managing temperature and uniformity. Furthermore, the system utilizes automated quartz-tube flow control for optimizing the processes. The overall dimensions of the furnace are 1200 mm (in height) and 1900 mm (length). TEL UL-2604-08-HS features a wide temperature range (up to 1,400°C) and low temperature uniformity of ± 2.0°C (expressed as 1𝛅). The temperature control is via a programmable logic controller (PLC) with a 5.7-inch color display. Additional features include process control using a heat flux calculation, in-situ O2 control via an integrated analyzer, and communication capabilities to link to a network of computers. The unit is equipped with advanced design features to ensure temperature uniformity and process repeatability. High precision resistive spiral heat wrap cartridges in the heater provide excellent temperature uniformity. An integrated heater fan helps to optimize the temperature distribution across the semiconductor wafer. Automatic air baffles connected to the heater provide additional temperature uniformity and consistent process distribution. TOKYO ELECTRON UL-2604-08-HS machine also provides advanced safety features to protect users and the process. A high-temperature limit switch is used to monitor the temperature of the heating chamber. It can detect any temperature fluctuations downstream from the heater and will automatically shut the tool down if dangerous operating temperatures are detected. An automatic chamber door lock ensures that the chamber is secure during the process. UL-2604-08-HS has an integrated automatic door unlocking asset. This model can be triggered manually via the PLC equipment or an external control. A single integrated package with the heater, quartz tubes, heater fan, and temperature control provides an efficient and reliable diffusion furnace & accessorie system.