Used TEL / TOKYO ELECTRON UL-2604-08-LS #9226251 for sale

TEL / TOKYO ELECTRON UL-2604-08-LS
ID: 9226251
Wafer Size: 6"
Vintage: 1988
LPCVD System, 6" 1988 vintage.
TEL / TOKYO ELECTRON UL-2604-08-LS is a diffusion furnace designed for the industrial production of semiconductor devices. It consists of a two-zone horizontal furnace with a P-type heating zone and an N-type cooling zone. The heating zone is heated using resistive heaters which can generate temperatures up to 1200˚C. The cooling zone features a forced-air cooling equipment that can reach temperatures as low as 200˚C. Both have uniform temperature distribution for a more even diffusion process. TEL UL-2604-08-LS is equipped with a modern-style controller, containing a PID controller, timer functions, and a touch screen LCD for easy operation. The controller is capable of running multiple programs, with up to 100 steps and 3 patterns, for automated sequences. The system also has an automatic temperature device (ATD) and a quick-tilt device (QTD) for ease of loading and unloading parts. TOKYO ELECTRON UL-2604-08-LS features a variety of safety features to ensure optimal safe operation. It features an exhaust unit for collecting contaminated gases, an emergency stop switch, and an automated fire alarm machine for smoke and fire detection. Additionally, the furnace can be used with an optional safety monitor tool to ensure all safety measures are followed. Apart from the main diffusion furnace, UL-2604-08-LS also includes a variety of accessory equipment that makes the process even more efficient. It includes an internal lift asset for easy loading and unloading of parts, as well as a furnace insert for more efficient delivery of the process gases. It also features an intrinsic gas monitor model that allows precise control of process gases. In conclusion, TEL / TOKYO ELECTRON UL-2604-08-LS is a diffusion furnace designed for the industrial production of semiconductor devices. It features advanced technologies such as PID controllers, timers, ATD and QTD functions, as well as a full suite of safety features. Additionally, the comprehensive list of accessories makes the equipment highly effective and efficient for a wide range of applications.
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