Used TEL / TOKYO ELECTRON UL-2604-08-LS #9226252 for sale

TEL / TOKYO ELECTRON UL-2604-08-LS
ID: 9226252
Wafer Size: 6"
Vintage: 1993
LPCVD System, 6" 1993 vintage.
TEL / TOKYO ELECTRON UL-2604-08-LS is a diffusion furnace and controller components which has several automation, safety and process control features. It is a versatile and high-efficiency equipment suitable for different processes such as diffusion, oxidation, doping, implantation and annealing. TEL UL-2604-08-LS has a modular design which allows it to be easily installed, configure and operated. It consists of two pieces of equipment, the control unit and the diffusion furnace. The control unit consists of data entry, a control panel, a user-friendly process controller and various status monitoring and protective features. It also has a touch-sensitive panel and graphical user interface for easy operation. The autonomous diffusion furnace allows operation and control of the processes via the microprocessor controller. It has a multi-zone heating system that consists of eight heating elements located in main and peripheral zones. These zones are securely isolated from each other and the process can be independently controlled. The furnace also features a diffusion oven mounted on top of the main chamber allowing for simultaneous operation of multiple processes such as oxidation, doping, implantation and annealing. TOKYO ELECTRON UL-2604-08-LS has several automated safety and process control features including a key switch interlock for safe system turn-on, an emergency stop button as well as temperature and pressure sensors for accurate monitoring of the process. This diffusion furnace is also equipped with a Data Logger for capturing process data which can be used for post-processing and analysis. In addition, the furnace and control components are designed for maximum operational safety which includes double safety procedures, control power monitoring and separate lead-through wiring for each zone. It also features a stainless steel container for horizontal passage of feedthroughs. Overall, UL-2604-08-LS is a reliable and user-friendly diffusion furnace and controller components suitable for complex processes and can be easily configured and operated. Its numerous enhanced safety and control features make it the perfect choice for your production requirements.
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