Used TEL / TOKYO ELECTRON UL 2604-08 #293591385 for sale

TEL / TOKYO ELECTRON UL 2604-08 is a sophisticated diffusion furnace designed and manufactured by TEL Limited. It is composed of three layers for various deposition processes: vertical heating, horizontal heating, and vertical cooling. The vertical heating layer is equipped with gas distributor, radiant heaters and three-stage, movable RF windows. The horizontal heating layer is equipped with multiple convection heaters and the vertical cooling layer is equipped with a circulating fan and heat sink. This diffusion furnace boasts a maximum temperature of 1,850°C and a maximum operation time of 90 minutes. Additionally, it is equipped with three 3000V power supplies to ensure precise and stable operation. Control of the power supplies is conducted via an integrated computer equipment, operating on Windows 7 OS. This operating system allows for various settings including temperature control, preheating zone control, deposition zone control and cool zone control. TEL UL 2604-08 can be used for various deposition processes and materials such as Poly-Si, Mo-Si2 and Ni-Silicid. Additionally, it can be used for both directional and linear deposition. It is designed to be energy-efficient, with a low power consumption and low noise level. It also has an auto-stop unit which will automatically stop operation when the process has ended. The equipment also includes an automatic hoist/de-hoist function and three air locks, allowing for rapid loading/unloading of work pieces. TOKYO ELECTRON UL 2604-08 is also equipped with a type-A shutter to help maintain low substrate concentration, allowing a greater uniformity of wafer texture. Finally, it is equipped with an upgraded remote access machine and an alarm lamp, allowing for an increased safety margin. Housed in a single robe and compact design, UL 2604-08 is an ideal diffusion furnace for various industrial applications. With integrated automatic control systems and various other features, TEL / TOKYO ELECTRON UL 2604-08 is a reliable, robust and cost-effective diffusion furnace from TOKYO ELECTRON.