Used TEL / TOKYO ELECTRON UL 2604-08H #9155404 for sale

TEL / TOKYO ELECTRON UL 2604-08H is a diffusion furnace and accessory designed to meet the high thermal requirements of semiconductor device manufacturing. This equipment consists of a high-performance, robust quartz body which allows for uniform heating. The robust quartz body utilizes a combination of in-situ and ex-situ heating methods as well as the principles of diffusion to evenly spread heat throughout the processing environment. TEL UL 2604-08H is ideal for dopant diffusion process. It offers features such as precision linear control of high-temperature heating, reliability, a wide temperature range, and low-temperature capability. Additionally, this system provides flexible peripheral device control options and excellent insulation properties. TOKYO ELECTRON UL 2604-08H unit has a multi-zone structure with horizontal main and filter zones. The main zone is divided into four individual temperature controlled areas. This furnace is designed with an efficient, closed-loop, ultra-low pressure hot wall interior, ensuring uniform thermal distribution throughout all four temperature zones. It is equipped with three cooling fans for increased cooling efficiency and addition of a CO2 baffle for controlling airflow. Furthermore, UL 2604-08H has an automated gas control machine capable of using a variety of gases with a maximum flow rate of 600 SLM. The tool also offers optional features such as remote control and monitoring, electron capture detector (ECD) for performance monitoring, programmable PID controller, and an anti-contamination filter. This asset is equipped with advanced safety features, such as emergency shutdown mechanisms and safety interlock model. Additionally, an exhaust port is installed to maintain ambient conditions and reduce process downtime. TEL / TOKYO ELECTRON UL 2604-08H is an advanced diffusion furnace and accessory designed to meet the stringent requirements of semiconductor device manufacturing. It offers an efficient, low-pressure hot wall interior, and efficient cooling fans for an even temperature distribution. This equipment is highly customizable and offers several optional features for increased safety and reliability. TEL UL 2604-08H is an ideal choice for the modern semiconductor device manufacturer.