Used TEL / TOKYO ELECTRON UL 2604-08L #293586739 for sale

TEL / TOKYO ELECTRON UL 2604-08L
ID: 293586739
Wafer Size: 6"
Vintage: 1990
Diffusion furnace, 6" 1990 vintage.
TEL / TOKYO ELECTRON UL 2604-08L is a high performance thermal diffusion furnace designed specifically for use in the semiconductor industry. The diffusion furnace uses a high-powered gas-feed tube and electrostatic principles to deposit and alloy layers of protective material onto the surface of semiconductor materials. It is highly accurate, energy efficient and reliable, making it a premier choice for semiconductor production. The furnace's gas-feed tube consists of two heat resistive surfaces. The first directs high power plasma onto the substrate to deposit the protective layer. The second surface is smaller and accurate and ensures a uniform area of diffusion. The uniform area ensures that the layer of protective material is consistently and efficiently diffused throughout the entire substrate. TEL UL 2604-08L has two optional components: dual automatic transfer arms and multiple-heat sensor-equipped dust collectors. The automatic transfer arms are used to transport wafer substrates between the many stages of diffusion and temperature control. The heat sensors, meanwhile, monitor the temperature of the furnace at multiple points and provide feedback to the controller. The dust collectors allow for the removal of airborne dust and particulate matter that may exist in the exchange chamber, keeping the work area clean and safe. TOKYO ELECTRON UL 2604-08L also has user-friendly touchscreen controls, which allow operators to customize their own profiles, depending on the materials being processed. The profiles are stored on a hard drive and can easily be adjusted, allowing for quick and easy adjustments when dealing with a variety of substrates. From a safety perspective, UL 2604-08L includes end-of-shutter alarms, third-person guards, and access-control systems. The end-of-shutter alarms are triggered whenever the furnace door is opened and will stop operation if the door is not closed properly. The third-person guards and access-control systems protect against unauthorized personnel entering the furnace chamber or performing unauthorized actions, respectively. Overall, TEL / TOKYO ELECTRON UL 2604-08L is a sophisticated, highly accurate and reliable diffusion furnace built to meet the demands of the semiconductor production industry. Its high-powered, energy-efficient gas-feed tube and dual automatic transfer arms, combined with user-friendly touchscreen controls and a multitude of safety-oriented features make it the preeminent choice for semiconductor production.
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