Used TEL / TOKYO ELECTRON UL 2604-10H #9148349 for sale

TEL / TOKYO ELECTRON UL 2604-10H is a diffusion furnace and accessory package designed to develop integrated circuit materials and components. It is suitable for a variety of thin-film deposition materials, including metals, oxides, and nitrides. This comprehensive package consists of a mainframe, an air-cooled mainframe, a Gas Cabinet, and various process components such as bubblers, temperature controllers, and a number of additional components essential for thin-film processing. The mainframe is created for high-performance thin-film processing and provides the flexibility of working simulations and the level of expertise needed to take on complex processes. Its design is user-friendly, enabling both high-speed operation and easy maintenance. Its high-speed heating and cooling system utilizes infrared ceramic heating elements, allowing for very precise control of temperature range. The air-cooled mainframe is equipped with a temperature controller, enabling operations of temperatures up to 400 °C.; as well as a Vycor window isolator, which permits unobstructed view of the process chamber during high-temperature processes. The Gas Cabinet provides an environment suitable for connecting the primary process components while maintaining a safe, controlled atmosphere; and includes a mass flow controller, pressure transducers, and a leak detector. Additionally, the package contains the necessary components for substrate loading and unloading; such as a mechanical vacuum pump, a gas valve, and a power pedestal. The package includes a wide array of peripheral components and accessories; such as bubbler pods, quartz vessels, temperature sensors, flanges, N2 purge bags, bond strands, aluminized insulation, and more. Additionally, special films, including diamond films, gold films, and titanium films, can be grown on various substrates. TEL UL 2604-10H package is a one-stop solution for innovative thin-film deposition needs, giving users the flexibility and expertise to take on complex processes with confidence. The package's unique design and advanced features make it an invaluable tool for achieving high-quality results across a wide range of applications.