Used TEL / TOKYO ELECTRON UL 2604-10H #9350447 for sale

TEL / TOKYO ELECTRON UL 2604-10H
ID: 9350447
Wafer Size: 4"-5"
Vintage: 2009
Diffusion furnace, 4"-5" 2009 vintage.
TEL / TOKYO ELECTRON UL 2604-10H is a high performance diffusion furnace and accessory designed for complex processes such as Epi, Ion Implantation, Oxidation, Sublimation, and Thermal Mechanical Processes. The unit has a versatile vertical or horizontal design in two sizes: 10" and 16". The 10" model is best suited for short duration processes, such as thermal treatments or rapid oxidation, while the 16" model is more suited for larger scale processes. TEL UL 2604-10H is made to maintain a tightly-controlled atmosphere even at high temperatures, as well as precise temperature control and uniform heating. It uses advanced materials and components for reliable, high-accuracy, and long-term stable performance, with a built-in heat reflection and exhaust equipment that maximize efficiency. At the heart of the UL 2604 is a TEL pyrometry system, providing precise temperature control up to 1600°C. TOKYO ELECTRON pyrametry unit includes a number of features such as automatic measurement of the thermal properties of heat treated objects, a uniform heating algorithm for uniform heating rate, and an adjustable heating time. For safety, TOKYO ELECTRON UL 2604-10H has a thick-walled quartz enclosure which is designed to withstand high temperatures and gas pressure, and to minimize radiation leaks. Additionally, a high-purity ceramic tube filled with a variety of chemistries is used to fill the chamber, providing an inert atmosphere. UL 2604-10H is equipped with convenient and advanced features. It has a long process window for high-temperature processes, a gas control that can be used to precisely regulate the atmosphere, a power-off machine for emergency shutdown, and a corrosion-resistant vacuum tool that maintains a clean, uniform temperature throughout the interior of the chamber. In addition to these features, TEL / TOKYO ELECTRON UL 2604-10H includes a number of accessories, such as a thermocouple, gas valve, and protective covers. It also comes with a variety of optional accessories, including an extra set of heating elements, a particle filter, and a rotating drive mechanism. TEL UL 2604-10H is an excellent choice for those in need of a high-performance diffusion furnace and accessory. With its advanced temperature control, uniform heating, safety features, and convenient accessories, it is one of the best on the market.
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