Used TEL / TOKYO ELECTRON UL 2604-10HL #293595280 for sale

TEL / TOKYO ELECTRON UL 2604-10HL is a diffusion furnace and accessories package engineered for applications such as advanced semiconductor device fabrication, MEMS (Micro-Electro-Mechanical Systems) device fabrication, and general advanced material processing. TEL UL 2604-10HL provides unmatched performance in terms of thermal uniformity and control for advanced precision temperature processing. The base configuration of TOKYO ELECTRON UL 2604-10HL includes a single-wafer process chamber, process-gas control equipment, and adjustable high-density susceptor support assembly. The single-wafer process chamber is constructed from graphite and compatible aluminum alloy for superior temperature uniformity. It features a loading/unloading door for specimen loading and unloading, as well as an integrated process chamber heater that can reach temperatures up to 2600°C. The process-gas control system enables precise temperature regulation and atmosphere control, ensuring clean and reliable process conditions. The adjustable high-density susceptor support assembly provides precise, repeatable specimen loading and positioning. UL 2604-10HL also comes with several accessory components. It includes a high-accuracy thermocouple, a quartz gas inlet manifold, and a quartz process showerhead. The high-accuracy thermocouple is designed to provide precise temperature measurement, while the quartz gas inlet manifold enables precise gas flow control and ensures clean operations. The quartz process showerhead is designed for process uniformity, enabling precise thermal control of the specimen. TEL / TOKYO ELECTRON UL 2604-10HL features an intuitive user-friendly interface and includes multiple safety features, including an emergency stop button and an over-temperature protection unit. The furnace also includes a data logging machine that stores process parameters and enables users to easily check process conditions from earlier runs. All of these features make TEL UL 2604-10HL an ideal tool for advanced semiconductor and MEMS device fabrication and general advanced material processing.