Used TEL / TOKYO ELECTRON UX-11P10-4HT #293819010 for sale

TEL / TOKYO ELECTRON UX-11P10-4HT is an advanced diffusion furnace and accessories equipment with performance capabilities that make it an ideal choice for many manufacturing applications. It features a standard ceramic susceptor plate and features a high-temperature rating, making it suitable for general-purpose thermal processes in the semiconductor industry. The furnace operates with a maximum temperature of up to 1150°C, ensuring a reliable and repeatable performance with hydrogen or nitrogen ambient. TEL UX-11P10-4HT has a robust construction and a range of features to ensure reliable operation and consistent performance over time. It features a zoned heating system, with 4 independently controllable heating zones that permit high temperatures to be achieved in a much shorter period. The furnace also features a cooldown unit that rapidly cools the chamber and susceptor plate, to allow further processing as soon as the desired temperature is achieved. It has a 1000 W/cm2 radiometric infrared CVD heating element, allowing for a consistent heating process and high-level process control. The furnace's temperature uniformity of ±3°C over a 100-280mm diameter wafer allows for a uniform thermal process over a range of substrates. TOKYO ELECTRON UX-11P10-4HT also includes a range of process options to ensure optimal performance for the intended products. It has a variety of flow control options for dosing gases within the reaction chamber, including mass flow controllers, MFC's, and an IFAC fixture to ensure an accurate concentration throughout the process. The furnace is also capable of running in low-pressure environments, with a low-pressure option that can be used up to 0.1 mbar. The machine also features an RF power source, enabling processes such as Plasma Enhanced Chemical Vapor Deposition (PECVD) to take place within the environment of the furnace. An integrated controller is supplied with the furnace, allowing the user to precisely control temperatures and monitor trends to ensure the highest level of performance throughout the process. UX-11P10-4HT is an ideal choice for a variety of manufacturing processes, thanks to its robust construction and reliable performance. Its wide range of process options, integrated controller and high-temperature rating make it an excellent choice for any production needs.