Used TEL / TOKYO ELECTRON UX-11P10-4HT #9198280 for sale

TEL / TOKYO ELECTRON UX-11P10-4HT is a diffusion furnace and accessorie, designed for high-throughput semiconductor wafer process operations. It is suitable for production and research applications, ranging from bulk silicon oxidation to high performance materials processing. TEL UX-11P10-4HT is a single-wafer horizontal diffusion furnace that can process up to four 8-inch diameter wafers or two 12-inch wafers in parallel. The equipment has a modular design, and its main components are a wafer holder, heater, gas distribution system, power supply, exhaust unit, and a reactive gas control unit. The wafer holder of TOKYO ELECTRON UX-11P10-4HT features a susceptor, ceramic dielectric heater and a powered lift mechanism. The susceptor heater has an AlTiC coating to improve thermal uniformity, which allows for improved temperature uniformity over the entire wafer surface during the diffusion process. The powered lift mechanism allows for fine adjustment of the heater and susceptor in the vertical Z-axis direction. The gas distribution machine of UX-11P10-4HT consists of a gas panel, flow meter and gas lines, which are used for introducing gases needed during the wafer processing. The power supply of the tool is comprised of an AC power generator and a DC power supply, which provides the power needed for the furnace's heating stage. The exhaust asset of TEL / TOKYO ELECTRON UX-11P10-4HT is designed to draw off the gases produced during the wafer processing and provides high exhaust efficiency. The gas control unit of the model contains the necessary components to inject the desired quantity of gases at the right moment for achieving the process requirements. In conclusion, TEL UX-11P10-4HT is a high-throughput diffusion furnace designed to handle the semiconductor process operations with an impressive level of control and efficiency. The modular design of its components make it easy to integrate into existing process flows, and its susceptor heater and gas control unit allow for precise temperature and gas management. Thanks to these features, TOKYO ELECTRON UX-11P10-4HT has become a reliable and cost-effective choice for both production and research applications in the semiconductor industry.