Used TEL / TOKYO ELECTRON UX-11P10-4HT #9198282 for sale

TEL / TOKYO ELECTRON UX-11P10-4HT is an advanced diffusion furnace and accessory package designed for memory fabrication applications. It features an ultra-thin chamber and advanced temperature control for precise and repeatable processing. The diffusion furnace is equipped with a Built-In Wide-Range Temperature Sensor, assuring accurate control of process temperatures up to 1100 °C. Its user-friendly multi-touch LCD panel makes setup and control of up to four different heating/cooling zones a breeze. TEL UX-11P10-4HT also offers a wide selection of tube material options, allowing users to tailor their equipment to their specific applications. The furnace's optional accessories include a 4-way gas flowmeter, controlling the flow of a single process gas, as well as an on-wafer heater for improved uniformity. An additional off-the-shelf automatic flow controller can be added to the system for additional control over multiple process gases if desired. TOKYO ELECTRON UX-11P10-4HT has an optional rotation mechanism, which allows the base of the furnace to rotate through a range of angles, making it ideal for splitting wafers. The chamber also features a removable graphite susceptor, fully machinable to the desired contour. This increases recipe flexibility and reduces 'edge effect peaks' during wafer rotation. UX-11P10-4HT is highly reliable and easy to service. Its monitoring systems can detect process interruptions before they occur, automatically shutting down all power in the event of an abnormality. The system runs on a clean, reliable 220V single-phase power supply and is designed for a maximum of 12A current. TEL / TOKYO ELECTRON UX-11P10-4HT is cULus, CE, and SGS approved and meets the highest European safety standards. Built to last, the system is coated with an oxide film to prevent corrosion and chamber degradation. These features make this diffusion furnace and accessory package the ideal choice for memory fabrication applications.