Used TEL / TOKYO ELECTRON UX-11P10-4HT #9198285 for sale

TEL / TOKYO ELECTRON UX-11P10-4HT
ID: 9198285
Wafer Size: 6"
Horizontal furnace, 6".
TEL / TOKYO ELECTRON UX-11P10-4HT is a diffusion furnace instrument and accompanying accessory package designed for wide-ranging applications in areas such as semiconductor fabrication, solar cell research, and other fragile and sensitive material research. This particular device is a horizontal parallel plate, four-zone furnace designed for efficient thermal processing in a vacuum environment with a wide range of process gas control. Multiple sets of upper and lower electrodes are placed in each zone to ensure homogeneous temperature as material is heated to the desired temperature. These electrodes are connected to an electronic power supply system, allowing for precise control of the current and voltage level. This configuration also allows for greater flexibility in how the furnace is used; the four zones of the furnace can run independent programs with separate temperatures for each program. The furnace chamber itself is designed for an efficient heat transfer, with a mass-produced lapped graphite structure optimized to absorb and transfer energy. The hot zone design features a full-face hat shape for uniform heating and a double-reinforced boron nitride insulation to ensure uniform temperature uniformity from furnace top to bottom. The whole system is mounted to a Class 1 vacuum vessel, creating the proper environment for low pressure processing. The package also includes programming accessories that allow for precise adjustment of temperatures and other parameters. The EasyGap software package makes programming much more efficient and easy to use. This package includes a parameter-based setup, providing more flexibility for experimenters. Users can control multiple parameters such as vacuum pressure, ramprate, temperature sensor locations, and cool-down speed. Finally, the package includes a variety of sensors for monitoring process parameters during and after the diffusion process. These sensors range from oxygen and hydrogen pressure sensors, temperature sensors, and emission sensors. Using these sensors, users can track and record process conditions and progress during the diffusion process. Overall, TEL UX-11P10-4HT diffusion furnace and accessory package provide a bundled solution for precise and efficient thermal processing and research. With its comprehensive hardware and software package, it can handle the most delicate and sensitive materials with accuracy and reliability.
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