Used TEL / TOKYO ELECTRON UX-11P10-4HT #9198286 for sale

TEL / TOKYO ELECTRON UX-11P10-4HT is an advanced, integrated diffusion furnace and accessory equipment that offers precision thermal processing capabilities for a variety of applications. This polygon-shaped, top-loading device is constructed from stainless-steel components and features a three-zone containment shell featuring a hermetically-sealed door mechanism to ensure maximum process repeatability and safety. The system functions by a single-zone, four-chamber array with direct heating elements at two opposing sides and a center component based on a patented "arrowhead" thermal diffusion design. The diffusion cell's active areas include a hot zone, warm zone, and cool zone, each with independent temperature control and a maximum temperature of 1150°C. The TiN-sphere process station is tailored to uniform diffusion processes and offers a flexible and reliable solution to industry-specific oxidation processes and other gases. Equipped with in-situ emissivity monitoring, TEL UX-11P10-4HT provides superior temperature uniformity and stability within the diffusion cell. On-board analysis tools enable real-time process monitoring with both gas and temperature measurements. The additional features of TOKYO ELECTRON UX-11P10-4HT include an automated wafer cassette process with a cassette adapter plate, a fully-enclosed active gas shower, a combined load lock/chamber unloading unit, and multiple rapid thermal process capabilities. Furthermore, the machine is equipped with a built-in, low-profile gas delivery tool to provide a consistent supply of process gases. The asset is also feature-packed with several user-friendly enhancements, such as an easily accessible maintenance model and a digital temperature readout display, as well as an intuitive process software equipment for both analysis and tracking. In summary, UX-11P10-4HT is an advanced, integrated diffusion furnace and accessory system with precision thermal processing capabilities for a variety of applications. Its hermetically-sealed door mechanism, three-zone containment shell, and in-situ emissivity monitoring provide superior temperature uniformity and stability within the processing cell. Along with an automated wafer cassette process and multiple rapid thermal process capabilities, TEL / TOKYO ELECTRON UX-11P10-4HT's feature-packed design is ideal for providing a consistent supply of process gases and easy user-friendly enhancements.