Used TEL / TOKYO ELECTRON VCF-615S #293591401 for sale

ID: 293591401
Wafer Size: 6"
Vintage: 1992
CVD System, 6" 1992 vintage.
TEL / TOKYO ELECTRON VCF-615S is a diffusion furnace and accessories specifically designed to meet the needs of the semiconductor industry. The furnace is equipped with advanced control systems and highly efficient furnace components, making it well-suited for producing high-quality semiconductor components. TEL VCF-615S utilizes a double-jacket, four-zoned, polysilicon-heated quartz tube with advanced temperature control. The furnace has a temperature range of 1000°C to 1100°C, controllable within an accuracy of +/- 1°C. Furthermore, the tube is surrounded by high-efficiency quartz walls for jointless insulation, ensuring high temperature uniformity and repeatability on its surface. TOKYO ELECTRON VCF 615S is designed with advanced safety features such as over-temperature protection, pressure-control systems, and a partially enclosed chemical atmosphere. Additionally, it features a wide range of accessories for enhanced performance, including a quartz boat, evaporation cabinet, and chemical vapor deposition (CVD) systems. TOKYO ELECTRON VCF-615S is highly suitable for processes such as diffusion, annealing, and CVD. It provides an efficient and flexible platform for enhancing process repeatability, product quality, and cost competitiveness. Moreover, the three-chamber design allows for quick installation and commissioning as well as reduced power consumption. VCF 615S is an ideal choice for demanding applications in the semiconductor and LCD industries. It is an extremely reliable diffusion furnace and accessory, providing the perfect combination of high product quality and cost-efficient production.
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