Used TEL / TOKYO ELECTRON VCF-615S #293747356 for sale

TEL / TOKYO ELECTRON VCF-615S
ID: 293747356
Wafer Size: 6"
Vintage: 1992
Diffusion furnace, 6" 1992 vintage.
TEL / TOKYO ELECTRON VCF-615S is a state-of-the-art diffusion furnace and accessories package ideal for maximizing yieldthrough microelectronic device manufacturing applications. It is equipped with sophisticated temperature regulation and control capabilities, as well as a wide range of feature enhancements to help ensure consistent, reliable performance. TEL VCF-615S consists of a high-profile diffusion furnace featuring premium halide-based heating elements and a durable, corrosion-resistant powder-coated process chamber for repeatable crystal growth in a clean, reliable environment. This chamber features an extensive temperature range of 200 to 1100°C at a process rate reached in only 6 minutes. For temperature control, TOKYO ELECTRON VCF 615S features a precise PID temperature regulation and control equipment, along with a precise, digitally-regulated thermoelectric cooling/heating system. This combination of technologies guarantees repeatable results for each diffusion application, even at the most extreme temperatures. VCF-615S also includes additional accessories such as an industry-leading LINACTIRIS o MgO (lithium niobate on magnesium oxide) susceptor and a wide assortment of replacement accessories. This versatilediffusion furnace package is well-suited for the most demanding industrial and laboratory applications, such as sintering magnet-based systems, device packaging, and specialized materials research. In addition, TEL VCF 615S offers advanced process monitoring and data collection unit capability. It is equipped with a graphical touchscreen display that ensures remote monitoring and operation, as well as powerful data storage and trending capabilities. This customizable interface allows operators to quickly access data and easily visualize diffusion process parameters as they change during each furnace cycle. To keep processes running smoothly, VCF 615S even contains an advanced fault detection and prevention machine, to alert operators of potential performance issues. TOKYO ELECTRON VCF-615S is the ideal solution for achieving safe, repeatable results in microelectronics and device fabrication applications. This complete diffusion furnace package delivers industry-leading performance, temperature regulation and control, along with a comprehensive suite of features to maximize efficiency and reliability.
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