Used TEL / TOKYO ELECTRON VCF-615S #9068949 for sale

TEL / TOKYO ELECTRON VCF-615S diffusion furnace is an advanced, digitally-controlled device designed for a wide range of diffusion applications. The diffusion furnace enables users to implement quick process times through controlled temperature settings and uniform heating on both sides of the wafer. TEL VCF-615S is built to provide evenly distributed heat up to 999°C, which makes it a great choice for anodic bonding, diffusion applications, and vacuum annealing. TOKYO ELECTRON VCF 615S includes a WINDOW-based control unit, a furnace, and accessories such as a flange heater, heater door, and a trusted TEL computer equipment. The WINDOW-based control unit is an easy-to-use process control system that can be used to customize process recipes. The panel enables users to observe temperature, process time, heating phase, and vacuum conditions throughout the diffusion process. The furnace consists of upper and lower chambers connected by a heated ceramic tube. Heating elements are located in the upper chamber. To ensure uniform temperatures, the upper and the lower chamber are regularly adjusted to the same temperature. For multi-wafer systems, special thermal barriers are installed at irregular intervals to create a temperature profile across the wafer surface. A heater door provides access to the upper chamber, and the flange heater helps maintaing uniform temperatures throughout the diffusion process. The trusted TOKYO ELECTRON computer unit helps users to manage the diffusion furnace and to control the processing parameters. They provide users with a secure machine that allows remote process control and monitoring of systems and processes easily managed from any location. VCF-615S diffusion furnace is an ideal, reliable solution for advanced diffusion applications in the semiconductor industry. The unique features of this device enable users to achieve faster process times, uniform temperatures, and precise process management through the trusted TEL / TOKYO ELECTRON computer tool.