Used TEL / TOKYO ELECTRON VCF-615S #9269439 for sale

TEL / TOKYO ELECTRON VCF-615S is a vertical diffusion furnace with a number of accessories that enable more precise and efficient diffusion processes. It is designed for applications in the semiconductor industry such as oxidation, gettering, deposition, and rapid thermal processing (RTP). The furnace itself is made from high quality components such as a stainless steel heat chamber. This chamber is matched with a powerful, dual-zone heating equipment, featuring both user-adjustable PID temperature control and 0.1℃ heating accuracy. The chamber can also be tilted to benefit from the gravity-assisted option, allowing for maximum uniformity in the diffusion process. TEL VCF-615S also features a quartz boat that can hold up to 200mm wafers. This boat is lifted by a double-doom gate that helps keep the wafers secure during the process. The quartz boat can also tilt to 45° for better wafer cooling and positioning. For loading and unloading, TOKYO ELECTRON VCF 615S is equipped with an automated wafer cassette shuttle system. This PC-controlled unit can move wafers up to half a meter away from the heat chamber to reduce the effects of thermal radiation on the operator. The shuttle machine also allows users to preload and post-load wafers for faster loading times. In addition to all of the above, TEL VCF 615S offers several accessories that can enhance its performance. One of these is the diffusion monitor, which monitors the diffusion process in real time to ensure safety and accuracy. The monitor also has a built-in color display that can be used to observe the process and to input data. Other accessories such as a data logger and pressure-vacuum systems can further increase the efficiency of the process. In conclusion, VCF-615S is a well-designed vertical diffusion furnace that offers many features and accessories for more efficient use. The furnace and accessories are all designed with safety and precision in mind, making it a great tool for semiconductor applications.