Used TEL / TOKYO ELECTRON VCM-50-003EPR #293666967 for sale

TEL / TOKYO ELECTRON VCM-50-003EPR, is a quality diffusion furnace designed to produce wafers with reliable integrity and flawless performance. It provides a high level of traceability and control to suit the demands of the most ultra high vacuum (UHV) applications. TEL VCM-50-003EPR is equipped with an internal wall furnace with outer insulation for superior high temperature performance. It is constructed for maximum vacuum performance in the range of 10-10 Torr. The design of the furnace ensures uniform temperature distribution across the UHV chamber and two-zone vacuum atmosphere for optimum oxygen concentration. The equipment is fitted with quartz reaction tubes, an upper pressure dome to hold the reaction tube, quartz tube burner, and a base support for easy access to the interior. The furnace also includes a C-shaped susceptor, an all-stainless steel loading chamber, and a door-locking mechanism. The furnace has been designed to be used with a variety of materials, including silicon, sapphire, gallium nitride (GaN), and other materials used in the semiconductor industry. To ensure maximum performance and traceability, all materials used in the system are thoroughly cleaned before use. Moreover, the precise control of carbon gas, nitrogen gas, chlorine gas, and other gas atmospheres make it the perfect choice for the most demanding UHV applications. TOKYO ELECTRON VCM-50-003EPR also features reliable external cooling for improved safety. The unit comes with carefully selected thermal hosing and receptacles for these cooling components. This ensures all outside compartments are kept at a safe temperature. To further enhance safety, the machine also comes with automatic monitoring and alarm systems with additional sensors to ensure a stable temperature. In summary, VCM-50-003EPR is an advanced diffusion furnace that is tried and trusted by the semiconductor industry. It provides a high level of traceability and control, all-stainless steel loading chamber, reliable external cooling, and careful selection of thermal hosing and receptacles for increased safety. Moreover, it features superior vacuum performance, precise control of gas atmospheres, and easy access for cleaning and maintenance.