Used TEL / TOKYO ELECTRON VDF-615S #293801781 for sale
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ID: 293801781
Wafer Size: 6"
Vintage: 1994
Diffusion furnace, 6"
NGC-M3
1994 vintage.
TEL / TOKYO ELECTRON VDF-615S diffusion furnace is a solid state chemical diffusion furnace designed for use in the semiconductor industry and research laboratories. With a temperature range of 50-900 degrees C, this diffusion furnace is suitable for a wide range of diffusion processes. Its design includes a solid graphite heating element, conduction-tuned heating curves, and a pressure-sealed chamber to ensure uniform heating. This diffusion furnace is equipped with a three-zone analogue temperature controller suitable for a variety of temperature profiles. For maximum precision, the front panel also contains an adjustable fan for better cooling of the back side of the chamber, an exhaust port, and a thermocouple connection. This allows for accurate temperature regulation and monitoring throughout the diffusion process. In order to ensure that the high temperatures necessary for diffusion processes remain uniform throughout the chamber, TEL VDF-615S also features a horizontal double-decked gas flow box. This ensures that the gas flow continually distributes evenly over the entire heating processor for uniform performances. TOKYO ELECTRON VDF-615S is also equipped with a number of other features geared specifically toward diffusion performance. Along the side are features including air inlet for rapid cool down, an air purge system for rapid gas purging and venting, and a turbo disk that helps to mix the gases. Additionally, the diffusion furnace is equipped with an optical window which allows one to visually observe the diffusion process. This window is protected with a quartz cover to prevent contamination of the chamber and make it suitable for use over a wide range of temperatures. In order to ensure the safety of the operator, a number of features have been built into VDF-615S diffusion furnace. This includes a exhaust flow monitor, emergency exhaust port, emergency start-stop switch, and an oxygen sensor in the exhaust pipe. These features help to reduce potential accidents and preserve the integrity of the furnace environment. Overall, TEL / TOKYO ELECTRON VDF-615S diffusion furnace is a reliable piece of equipment that is suitable for a wide range of diffusion processes. It features advanced safety features and temperature control, making it an ideal piece of equipment for research and industry.
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