Used TEL / VARIAN 200SJ #293794396 for sale

Ion implanter, 4"-6" Throughput: 200 Wafers Gases: Ar, BF3, PH3, ASH3 HORIBA SEC-200 Mass Flow Controller (MFC) End station unit Beamline unit Ion source unit Console unit (3) CTI-CRYOGENICS Cryo-Torr 8 Pumps (2) ULVAC VDN602 Pumps Laminar flow SUZUKI C300 Compressor (M/N: CCT-C37003B) DCG-180SB High voltage Power supply DCG-16WC Scan power supply LPS4X10K3MA Focus power supply Suppression power supply ARC Power Supply FIL Power supply Source magnet power supply Analyzer magnet power supply Extraction power supply Dose processor Power supply: 208 V, 22 kVA, 3 Phase, 4 Wire, 60 Hz.