Used THERMCO 10000 #9311638 for sale

ID: 9311638
Wafer Size: 4"-6"
Diffusion furnace, 4"-6" Process: LPCVD Si3N4, LTO and oxide (4) Tubes Loaders included 2nd PLY Tube and LTO tube non-functional.
THERMCO 10000 is a diffusion furnace and accessory kit commonly used in industrial manufacturing processes such as producing alloys with protective layers, semiconductor doping, or creating films or layers of any material. The equipment consists of a tube furnace, an integrated controller, a process gas box, and a gas manifold allowing for multiple sample control. The tube furnace is constructed with a porous alumina wall that is used to transfer heat and an interior furnace that utilizes molybdenum disilicide heating elements to control the temperature precisely. The furnace measures 8-inches in length with a crystal quartz glass viewing window to monitor the process. The quartz is temperature rated up to 3000°C. A door mounted transfer arm is available and allows for sample loading and unloading. The controller of the system includes a 5-step programming touchscreen with a built-in adjusting monitor, two precision e-meters to measure temperature and process gas flow, and a built-in communication port. An alarm unit is built into the controller to alert operators of any process anomalies. The integrated process gas box utilizes two regulators and a supply of either Nitrogen or Ammonia through the distribution manifold which can be programmed to multiple samples or process steps. Part numbers matching the correct gases must be entered into the controller before the process can be initiated. The supplied transfer arm is designed for manual handling of quartz or metal cylinders to carefully handle samples in and out of the tube. All connections to the machine are quick disconnect and may be placed inside the furnace to reduce the need for additional space. The complete 10000 tool including accessories is available for applications that require higher temperatures, accuracy, and quick response times. This diffusion furnace and accessory kit is designed to perform reliably for multiple cycles and process steps without the need for proficient technical support.
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