Used THERMCO 5200 #9094066 for sale

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ID: 9094066
Wafer Size: 6" & 8"
Furnace, 6" & 8" (4) Tubes: (3) 6", (1) 8" Atmospheric Boatloader paddle system upgraded to Bruce Technologies silicon carbide paddle system Operator control panel (OCP) is a Bruce Technologies system Currently installed in cleanroom.
THERMCO 5200 is an advanced diffusion furnace and accessorie equipment from THERMCO Instruments Inc. This system is designed to meet the needs of users on a wide range of applications. 5200 is a dual chamber, dual stage diffusion furnace capable of processing up to 16 wafers with a maximum temperature rating of 1150 Celsius. The unit utilizes Rapid Thermal Processing technology and is designed with a 8-inch turbo fan machine to ensure even temperatures over the entire wafer surface. It also features both closed-loop and open-loop, internal temperature and pressure settings to ensure accurate temperature control. The tool is controlled by a touch screen user interface, providing easy and intuitive programming. The high resolution of the touchscreen effectively displays information and allows quick access to the settings and functions of the asset. The model includes auto-cool features, which ensures rapid cooling of the wafer simultaneously with the de-activation of the process. THERMCO 5200 is built for optimum process uniformity, repeatability and reliability. The equipment offers variable speed heating, variable speed cooling and variable settings for repeatable processes. It includes monitoring electronics, which display accurate readings and timings on the user interface, enabling the user to quickly make adjustments as necessary. It also includes a timer that helps keep track of wafer production timings and helps to ensure better process results. 5200 is ideal for producers that require a quick start-up time. The system has a limited warm-up time, that ensures the unit is ready-to-use almost instantly. The machine is also user friendly, with users being able to control the processes on the user interface. It's also suitable for companies looking to operate the tool with minimal staff, as the asset is compact and easy to install and operate. The model comes with accessories, such as heating elements and glasses, as well as replacement parts if required. It also comes with THERMCO 5-year warranty, to ensure customers have the peace of mind in knowing that the equipment is reliable and durable for their applications. Overall, THERMCO 5200 is an advanced Diffusion Furnace and Accessorie system that offers users superior performance in terms of uniformity, repeatability, efficiency and safety. Its user-friendly interface and interaction allow for easy and intuitive programming, while its durable design and parts ensure a long-lasting performance.
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