Used THERMCO 5200 #9226173 for sale

ID: 9226173
Wafer Size: 6"
Diffusion furnaces, 6" SiC Tube (7) Quartz tubes.
THERMCO 5200 is a diffusion furnace & associated accessories specially designed for use by manufacturers and research and development centres dedicated to producing high-quality microelectronics and semi-conductors. It boasts an impressive oxygen free environment, meaning no oxygen contamination during processing and a very low copper reaction. 5200 is a tempering furnace with a temperature range from 300-850°C and a programmable cooling rate from -10 to -60°C/min. The diffusion furnace features a temperature uniformity of ±5°C, helping ensure consistent results throughout the entire processing cycle. It also features a powerful convection equipment and displays integrated current monitor and remittance output. THERMCO 5200's efficiency is due to the fiber insulation and insulation brick in the furnace chamber, dual forced convection sources, PLC-controlled oven, and advanced PID temperature control. In addition, the diffusion furnace's advanced evacuation system, including chemical pumps, flow meter and extraction valve, ensure a clean and safe environment. Interlocking protections, such as anti-backfire, over temperature protection, and input signal protection, keep operators safe from potential dangers. 5200 can accommodate samples up to 1.2m in length and 30cm in width, making it ideal for many applications. Its flexible wire rack unit and convenient quartz tube access let users easily place and remove their samples. The removal wafer is conveniently secured with a lock, to ensure the safety of the sample at all times. All in all, THERMCO 5200 is a reliable and energy efficient diffusion furnace with advanced technology for enhanced results. The superior temperature uniformity and powerful evacuation machine, combined with its built-in safety features make 5200 a reliable choice for high quality microelectronics and semi-conductors production.
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