Used THERMCO / SVG 2600 #293660859 for sale

ID: 293660859
Diffusion furnace.
The THERMOCOTHERMCO / SVG 2600 is a diffusion furnace and accessory designed to work with an integrated vacuum equipment. It is designed for use in the processing of advanced materials such as semiconductor, display, and optical materials. The digital controls on the machine are designed for intuitive user interface for easy operation. The furnace features two chambers that can be operated independently, providing multiple temperature zones. The furnace can reach temperatures of up to 1250°C. The large chamber can accommodate multiple substrates which makes the furnace versatile and able to meet the requirements of a variety of applications. The chamber includes a replaceable bottom liner which works to protect the substrate from damage caused by the diffusion process. The furnace includes an automated gas delivery system and comes with a dual arm manipulator unit. The gas delivery machine consists of a vacuum line connected to a mass flow controller. This allows for the introduction of pure inert gas at a precise rate, allowing for precise control of temperature, flow and dwell time. This tool is designed to be pre-programmable, allowing for repeatable processes. The dual arm manipulator asset allows for the increased precision of wafer and substrate placement. The manipulator is capable of accurate substrate placement and can enable absolute repeatability for optimal repeatability of processes. SVG 2600 features an integrated automated control model for precise control and monitoring of all process parameters. This equipment can store up to 25 programs, allowing for several recipes to be programmed into the furnace, allowing for easy process repeatability. The furnace also includes a data logging system which allows for real-time process monitoring and graphing for easy analysis and troubleshooting. The furnace has several safety features for complete protection including an adjustable timer, over temperature protection, and gas flow control. THERMCO 2600 is a versatile diffusion furnace designed to meet the needs of a variety of applications. It features easy-to-use digital controls, multiple temperature zones, dual arm manipulator, integrated gas delivery unit, and automated control machine. The added features of the automated control tool and data logging allow for precise control and process monitoring. This furnace is a reliable and efficient choice for the processing of advanced materials.
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