Used TKK / TOKAI KONETSU KOGYA TRL300.300 #9351623 for sale

TKK TRL 300.300 is a high-efficiency diffusion furnace equipped with a variety of accessories to facilitate repeatable and reliable sample processing. The furnace is suitable for wide range of vapour deposition and etching processes required for the fabrication of semiconductor devices. The KOGYA TRL300.300 is a vertical-type multi-zone furnace designed to meet the stringent Process Development Requirement. It is equipped with a quartz tube heater that provides maximum heating in a uniform temperature distribution. The quartz tube allows for precision adjustment of the temperature across the entire length of the heating zone. The heating zone is further divided into three regions. Each region can be set to a different temperature, providing optimal conditions for specific processing cycle. The furnace has an integrated turbo pump assembly and a pressure-controlled pumping equipment that eliminates back streaming, minimizes thermal stress, and can easily accommodate wafers of various sizes. The pumping system is designed to minimize fluctuations in pressure and maintain a consistent temperature and pressure profile throughout the processing cycle. A high-performance inert gas delivery unit is mounted on top of the furnace to ensure consistent process accuracy and repeatability. The gas delivery machine works to maintain the required gas purity and flow rate, and provides adequate dwell time for the process components. The inert gas delivery tool is further equipped with a mass flow controller to regulate the gas delivery rate. The mass flow controller controls the flow rate of the inert gas feed tube to maintain a consistent process temperature and limit inert gas contamination. The furnace is also equipped with a gas box module that provides a nitrogen blanketing gas to the heating zone to prevent oxidation of the substrate. The nitrogen blanketing gas is maintained at a set pressure, ensuring safety and reliability of operation. TOKAI KONETSU KOGYA TRL 300.300 is a high-quality, reliable, and efficient furnace that is designed to meet the most demanding production requirements. Its various accessories and features make it highly suitable for repeatable and reliable diffusion processing.