Used TP SOLAR MD 246 #9279732 for sale
URL successfully copied!
ID: 9279732
Vintage: 2018
Fast firing IR furnace
Specifications:
Wafer transfer height (mm): 955 ± 35
No of lanes and pitch (mm): 2 Lanes @250 pitch (centre to lane centre), single tunnel
Wafer sizes, mono and multi crystalline (mm): MO (156 x 156), M2 (156.75 x 156.75)
Easily modified for M4 (161.7 x 161.7mm) by belt change
Belt speed range (mm/s): 50 to 170 preferred, 50 to 145 acceptable
Belt speed accuracy (%): ± 0.75
Belt type: Edge contact, NiCr Steel mesh
Wafer repeatability on belt start position to end position (mm): ± 4
Wafer breakage rate (%): 0.05 (~2.8 broken wafers per hour @ 125k wafers per day)
Roller diameter, entry / Exit (mm): 152 / 49 (excluding belt)
Feed direction: Left to right
Length (metres): 9.4 ± 0.1
Height furnace (metres): < 1.7
Height VOC oxidiser (metres): < 1.95
Weight per section (Kgs): Drying (6 legs) < 2100, firing (6 legs) < 1425, cooling (6 legs) < 1250
Functional:
Up time (%): > 98.5
Wafer to wafer temperature uniformity under full load (C): ± 5 (S 250 mm lane pitch and 180 mm pitch within each lane
VOC Oxidiser efficiency (%): > 98%
Wafer exit temperature: < 55°C
Throughput (Mean wafers/hour): > 5600 @ 180 mm wafer pitch
Maximum temperature firing: 1000°C
Maximum temperature drying: 400°C
MTBA (Minutes): > 20
MTTA (Minutes): < 0.5
MTBF (Hours): > 7700
MTTR (Minutes): s30
Power supply: 50/60 Hz, 380-480 VAC, 3 Phase
2018 vintage.
TP SOLAR MD 246 is a quality diffusion furnace engineered and manufactured by LPE Equipment Incorporated. With a state of the art design, the diffusion furnace features the highest quality construction to minimize heat loss, as well as safety and ease of use. The unit has a robust construction and a versatile size to accommodate large and small wafers. The diffusion furnace also comes with a range of accessories that further improve the performance and efficiency. MD 246 utilizes high temperature vacuum diffusion technology to deposit precise layers of thin film on wafers. This allows the user to deposit any of a range of thin films such as metals, oxides, nitrides, fluorides, and poly-silicon on substrates in a highly repeatable manner. This high temperature diffusion technology ensures the highest level of repeatability, and allows precise control over the size of the thin film layer. To support these capabilities, TP SOLAR MD 246 comes with a range of accessories. The most important of these are the cooling coils, which are specifically designed to minimize heat loss. The coils are designed to allow uniform cooling of the wafers and ensure the highest level of repeatability. The diffusion furnace also comes with a bellow to ensure a secure fit, and vacuum hose to allows for a leak-tight seal when used in a vacuum environment. Furthermore, the unit ships with a thermocouple that allows for precise temperature readings in the diffusion chamber. In addition to the essential accessories, the unit also comes with a range of optional accessories. These include heaters, evaporators, and chillers, each of which adds further versatility to the diffusion chamber. Furthermore, the unit also comes with software that allows full control of the unit from the PC, allowing the user to monitor and control the temperature and other variables during the diffusion process. Overall, MD 246 is an excellent diffusion furnace that offers a range of features. With its robust construction, high temperature vacuum diffusion technology, and a range of accessories, the unit ensures the highest level of repeatability and accuracy while providing safety and ease of use.
There are no reviews yet