Used ULVAC H6350 LH / RH #9409629 for sale

ULVAC H6350 LH / RH
ID: 9409629
Horizontal furnaces.
ULVAC H6350 LH / RH is a diffusion furnace and accessories specifically designed for use in the manufacture of semiconductor devices. It is equipped with dual hot-wall furnaces top and bottom and provides a high degree of precision, accuracy and repeatability. The furnace is capable of reaching a maximumTemperature of 1000°C, with a process temperature range of 100°C to 900°C and an effective quantity of 475 litres. The LH/RH diffusion equipment is designed to provide a tight, uniform, low emissivity, heater environment with minimum system temperature fluctuations. The furnace is comprised of an all-metal, open-ended modular design enabling the user to easily monitor, configure and inspect the unit. The power feed, gas supply lines, data lines and other process components are fully integrated and connected to guarantee a safe and uniform diffusion coating process. The furnace has a large temperature control range of +/-50°C and can be accurately monitored by a built-in microprocessor for more precise results. The machine is designed with an independent hot-wall heater and a protective reflector insulating the top surface. This heater is designed in accordance with all safety standards and manufactured to the highest quality. H6350 LH / RH is ideal for use in the fabrication of semiconductor devices including chips and wafer dies, and is equipped with automated loading and unloading of the products. It is also compatible with a number of process gases and is equipped with a typical loading rate of 375 W/cm2. ULVAC H6350 LH / RH diffusion furnace and accessories is equipped with a digital logic controller and a vacuum-based pressure vessel providing a reliable and automated vacuum tool for convenience and production output. The multiplex digital firing asset utilizes logical materials and automatic pressure control for maximum efficiency. In addition to its reliable and repeatable performance, H6350 LH / RH Diffusion Furnace and accessories is designed with an intuitive and efficient control model for enhanced control of the process. An intuitive user interface allows for easy configuration and access to operational data. A central process controller allows for efficient monitoring and tracking of process parameters, providing the user with a safe and effective production process.
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