Used ULVAC Rise 300 #293608977 for sale
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ULVAC Rise 300 (Ultra Low Vacuum Access Chamber) is an advanced diffusion furnace and accessories from ULVAC Technologies, Inc. It provides precise temperature control, precise vacuum grade, and ability to process large substrates for a variety of applications in the semiconductor industry. Rise 300 comes equipped with four horizontal reaction zones and one vertical reaction zone in an environmentally controlled container for precise temperature uniformity. The container size is 16" x 18" x 24" and can handle up to 2.5"x 4" substrates. The maximum temperature of the four reaction zones is 1600°C, and the actual highest temperature of each zone is continuously monitored by TC/RTD sensors that prevent unsafe conditions. The heavy duty quartz lid is designed to eliminate radiation loss and provides precise temperature control. ULVAC Rise 300 provides a precise vacuum grade up to 0.0033 Pa. It is built with an adapted oil pump and turbomolecular pump which allows reaching high vacuum levels considerably faster than any other diffusion furnace. The vent valve design prevents vacuum loss and minimizes contamination by maintaining a high vacuum level while processing. Rise 300 is equipped with ULVAC proprietary fire & forget technology. This allows the unit to perform a series of operations with one setup and without any manual intervention for up to 72 hours. It also allows for a continuous run of either a single process or up to six processes that can repeat in any order or combination, enabling flexibility to match the process requirements. ULVAC Rise 300 comes with a user-friendly LCD control panel that allows for easy programming and management of the different processes from one location. It also has a built-in Optical Emission Spectrometer that increases sample throughput time. In addition, Rise 300 is equipped with all of the latest safety features to ensure the safety of the process and to extend the lifespan of the unit. It is also designed to be compliant with environmental regulations, making it an ideal choice for any semiconductor chip production facility.
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