Used ULVAC Rise 300 #9297203 for sale

ULVAC Rise 300 is a multi-purpose diffusion furnace and ancillary equipment used for ion implantation, rapid thermal processing, and dopant diffusion in advanced device technologies. It features a vertical cylinder-shaped quartz chamber, equipped with up to three independent sources of inert gas and a vacuum equipment for rapid furnace evacuations. Additionally, the furnace is capable of admitting source materials through a reaction port, allowing mass transport of reactants to the reaction chamber interior. The furnace boasts a rotationally symmetric triple-zone heating arrangement that offers uniform temperatures throughout, also allowing for accurate temperature control of its 0.2 m interior. Rise 300 allows for a wide variety of processations at various temperatures (1-300 °C) and is designed to allow for adjustment of the dimensions of each zone and the process atmosphere, facilitating the adaptation of the system to accommodate different process requirements. ULVAC Rise 300 is equipped with a high-precision digital data acquisition unit, capable of acquiring temperature profile data with a resolution of 10 μm and 0.1°C. The embedded software suite allows for fine-tuning of the heating profiles and sequences. The profile data can be stored for later analysis in a variety of data output formats, or transmitted to a commonly used software package. Rise 300 series also features a built-in thermal pyrometer and IR heater with an accuracy of +/- 3°C, allowing for accurate control of temperature and process atmosphere. The ancillary device stack includes a power supply circuit, SiC boat actuator, exhaust gas separation unit, and a vacuum pump. Each component is specially designed to be virtually maintenance-free and offer superior reliability. The machine is also water and dust-proof and can be intermittently operated and stored in harsh conditions without the danger of component degradation. The delivery package of ULVAC Rise 300 is a complemetary package of software, hardware, and other components to optimise the user's experience and ensure efficient operation of the device. The comprehensive documentation and ease of use make it an attractive choice for a wide range of research and production activities.