Used ULVAC V8-100LC #9350448 for sale
URL successfully copied!
Tap to zoom
ID: 9350448
Wafer Size: 6"
Vintage: 2009
Vertical furnaces, 6"
Process: Poly-Si
(2) Main body
Duct unit
(2) Doors
Control unit
Heater
Top cover
Pump rack
2009 vintage.
ULVAC V8-100LC is a diffusion furnace and accessories equipment designed and manufactured by ULVAC, Inc., a global leader in advanced process and materials engineering. Designed to provide high-precision diffusion annealing for various materials including silicon wafers and patterned substrates, this is an ideal system for reaching optimal rare-earth alloy integration and other production processes. V8-100LC unit is comprised of a furnace chamber that is made of stainless steel and utilizes a floating-type insulation structure to better maintain a steady temperature distribution throughout the chamber as well as excellent thermal insulation. In addition, a parallel twin-shotgun type heating machine allows for exceptional heating speed and uniformity throughout the chamber, allowing for rapid and uniform diffusion annealing. The interior of the chamber also includes structures for optimal gas flow for diffusion processes. The tool is accompanied by a heat shield and a control panel consisting of an integrated controller and software. Configurable parameters allow for an accurate control of the temperature, pressure, and flow of both the furnace and the diffusion process. Even more precise control is made possible through the integrated computer and software asset, allowing for complex and sophisticated process management. The model is equipped with a proprietary loading equipment for the safe introduction and removal of the materials to and from the furnace chamber. The loading system also helps the the unit to maintain a safe pressure after loading. An automatic safety machine is also included for emergencies and includes features such as flame suppression and over-temperature protection, ensuring operators can work safely and securely. The tool also includes various optional features for customizability. This includes an optional burner asset for different furnaces, a powerful cooling fan, and an optional sputtering and doping model. The equipment's advanced automation capabilities further helps with warehousing and loading of the desired materials. ULVAC V8-100LC system offers an outstanding solution for the diffusion annealing of materials for industrial and research purposes. With its robust design and advanced automation technology, this unit allows for efficient and precise diffusion annealing processes, making it the perfect choice for a range of production and research procedures.
There are no reviews yet