Used VARIAN 200SJ #9269475 for sale

ID: 9269475
Wafer Size: 6"
Ion implanter, 6".
VARIAN 200SJ is a highly efficient, diffusion furnace designed for processing various types of materials. The furnace features a powerful 48 kW junction-controlled quench motor for faster ramp rates and lower thermal gradients, enabling greater reproducibility. This high-performance furnace has an adjustable quartz reaction tube rated to 1100 degrees Celsius, which facilitates efficient operation under a wide range of conditions. With eight heating zones, the furnace is capable of reaching temperatures up to 1200 degrees Celsius for fast and precision processing. In addition to the diffusion furnace, 200SJ also includes several accessories for improved process capabilities. Among these are a high-performance side-arm dry-gas feeder system, a 200 cc/min low pressure mass spectrometer, a precision fine-tuning gas mixer, and a quartz gas injection tube. The mass spectrometer allows for greater control and accuracy in monitoring gas composition, while the gas mixer helps to maintain a precise and consistent gas temperature and pressure distribution. This helps to ensure the homogeneity of the diffusion zone and substrate. The quartz injection tube and pneumatic gas pressure turnouts also help to facilitate repeatable gas flow rates and precise position control for localized processing. The turnouts provide precise control of gas pressure and flow rates during quench operations as well as during purging during cooling down and before loading or unloading of substrates. VARIAN 200SJ also offers advanced computer control capabilities, with a Graphical User Interface (GUI) that is intuitive and easy to use. With this, users can save and recall process recipes quickly, and monitor the furnace's performance in real time. Altogether, 200SJ is an excellent diffusion furnace for processing various types of materials, with advanced features and accessories for improved process capabilities. This makes it a great choice for users looking for precise, repeatable processing under a wide range of temperatures.
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