Used VEECO LSA 100 #293687430 for sale
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ID: 293687430
Wafer Size: 12"
Vintage: 2006
System, 12"
Frontend module
Electrical rack
Cassette to cassette handling
Optical output module
ROFIN DC035 Laser
Laser type: Carbon monoxide laser, 5000 W
(2) AFFINITY Heat exchanger, 25 kW
SEMI / JEITA Wafer thickness and flatness
Wafer type: Doped, Un-doped and SOI Substrate
Linear motor drive
Hot chuck
Damper
Transformer: 100 V
(2) Transformers: 400 V
Gases: CO 6%, He 94%, N2, CO2, Xe
Linear scan with fixed laser
Air ambient
Temperature: 1150°C-1350°C
LSA Chamber (DSI) with chemical filter option
Signal light tower
Water leakage sensor with pan
Electric leakage breaker
Touch screen monitor
Flat panel display
Graphical user interface
PC Controller
EBARA 25AAF202 Cooling water circulation pump missing
Non-functional parts:
Plate window
Mount blades (Left and right)
(2) Chillers (25 kW, 50 kW)
2006 vintage.
VEECO LSA 100 is a top-of-the-line diffusion furnace equipment designed for high-performance semiconductor processing. This advanced system combines cutting-edge technology with precision control to deliver superior results in a variety of applications. LSA 100 features a robust construction and a compact footprint, making it suitable for both research and production environments. The unit is equipped with a high-quality quartz tube that ensures uniform temperature distribution and reliable operation. The tube is heated by a series of heating elements, which are controlled by a sophisticated temperature management machine to achieve precise thermal profiles. One of the key features of VEECO LSA 100 is its advanced gas delivery tool. The asset is capable of delivering a wide range of process gases with high purity and precision. This ensures that the desired chemical reactions take place within the tube, resulting in consistent and high-quality film deposition. LSA 100 is also equipped with an innovative process control model that allows users to program and monitor the deposition process with ease. The equipment features a user-friendly interface that displays real-time data on temperature, pressure, gas flow rates, and other critical parameters. Users can easily set up custom recipes, monitor process performance, and make adjustments in real-time to optimize results. In addition to the main diffusion furnace unit, VEECO LSA 100 comes with a range of accessories that enhance its functionality and versatility. These accessories include gas flow controllers, vacuum pumps, mass flow controllers, and other components that are essential for semiconductor processing. The system is also compatible with a variety of wafer sizes and materials, making it suitable for a wide range of applications. LSA 100 is designed to meet the demanding requirements of the semiconductor industry, where precision and reliability are paramount. The unit is capable of performing a variety of processes, including oxidation, annealing, doping, and more. Whether you are conducting research or manufacturing advanced semiconductor devices, VEECO LSA 100 provides the performance and control you need to achieve outstanding results. Overall, LSA 100 is a state-of-the-art diffusion furnace machine that offers exceptional performance, reliability, and control. With its advanced features, user-friendly interface, and versatile accessories, this tool is the ideal choice for semiconductor processing applications. Whether you are looking to develop new technologies or optimize existing processes, VEECO LSA 100 is a trusted solution that delivers superior results.
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