Used TEL / TOKYO ELECTRON Lot #9048430 for sale

Lot of spare parts: 4 M10-400214-2 DOOR GUIDE 1 018-001849-1 LM GUIDE 3 0003CR0009 COUPLER, ENCODER, ELEVATOR 2 MT3-019550-D DRIVE SHAFT 8.7" FOR HTO TEL. 1 MX3022780A ROTARY SHAFT 4 M10-402654-2 ROLLER SHAFT 2 CT027-002169-1 QUAD SEAL X136 VITON 1 170000891 TUBE, FLEX 1 CT302-490024-2 7 PULLEY B 2 310-405623-3 VANE LIMIT (A) 4 CT1380-102135-11 LAMP,WAFER EDGE EXPOSURE,MARK 7 1 ES051-001009-1 WEIGHT COUNTER, SPRING SCALE 4 220002481 BEARING (630ZZ) 10 220002191 BEARING (6001ZZ) 6 036-000572-1 RESISTOR, PLATINUM PT2020 1 60S2M142 BELT 6 310-3621721 GUIDE, WAFER, (6)R 2 DS-051-000133-1 UNIT, METER RELAY 6 310-3621713 BLOCK, WAFER GUIDE 4 3BR01941 BEARING, S/L, SM25 GU-S 1 310-495511-2 PINCETTE SUPPORT VU-106 NCR-68-2 25 026-001506-1 BUSHING,BU-687 D 3 1110-413111-11 SLEEVE T/C PORT 4 018-000483-1 LINEAR MOTION BEARING 1 CT2910-403437-12 BLOCK,PIVOT,RIGHT 3 CT310-411302-3 CYLINDER SPACER 6" 4 018-000521-1 BEARING SMS16 5 83027-101039-1 O-RING 2 1110-400007-11 NUT,TEFLON,M18 2 03-00013 CASSETTE SADDLE W/HOLES 4 310-449080-3 TIMING PULLEY 12 B21985-316162-16 OUKA QT BOTTLE CAP ASSY 3 28C16A-20/P-ND EPROM, 2KX8 16K 4 012-001827-1 VALVE, SOLENOID VJ314MT-6LOZ-X44 3 CT024-012804 SENSOR, AIR CYLINDER (CS5HA3) 1 024-005261-1 CYLINDER AIR 3 027-100496-1 O-RING 7 CT1380-000990-13 MARK 8 COATER, INNER CATCH CUP 1 880-020193-2 LM GUIDE 1 880-020192-2 LM GUIDE 2 0001SL0001 SWITCH, OVER-RUN, ELEVATOR 4 225-S1-03 RECPTICLE, 3-PRONG 3 310-456187-1 STOPPER, (L) 3 310-456188-1 STOPPER, (R) 3 310-463883-1 GUIIDE, HARNESS, WAFER CENTERI 2 9760-0288 O-RING, SILICON 4 CT024-000004 CYLINDER, AIR., KAOS4X10 15 MWDA-00204-P01 CAP, BRASS PIRANI PORT 13 NSK-7202B BEARING, OPEN 5 PS-13511-12 O-RING 4 QL-C-150 SENSOR, HMD LEVEL 1 CT-36-001665-1 DETECTOR, RESISTIVE TEMP Y113 1 S473D12001 HALOGEN LAMP FOR ILLUMINATING MXA20104 1 1810-424742-11 SPACER 5 50R0119808 O-RING 4 50R0118863 O-RING 2 2110-330148-11 SPACER,TEFLON 12 2-140V747-75 O-RING,027-100165-1 1 CT035-270666-1 SWITCH, PUSH BUTTON DHM-257MW 25 027-001081-1 O-RING 10 LMH7FJW LAMP 13 MX4-040430-B TEFLON SPACER 1 385-332398-4 CLAMP 11 AHX-654M LAMP 1 030-999171-1 CONNECTOR 3 027-0002561 O-RING 7 ES027-100456-1 O-RING 4 0003C000304 SPEED CONTROL, ELEVATOR 2 1IH0012710 MICRO PHOTO SENSOR 1 023-000625-1 BELT, TIMING 4 ES028-006925-1 FLANGE 7 023-000287-1 BELT, TIMING (.037-XL-0116E-J) 12 CT024-005721-1 SPEED CONTROLLER SPR-HS-M5 3 140007 SWITCH, ACTUATOR, OVER-RUN, VA 1 0003BR0423 BEARING, E/L, 7303 1 222-C1-27 SPRING, TENSION 56 LMH7FJR LAMP, RED 39 LMHFJW LAMP, WIRE 1 CT024-001636-1 SPEED CONTROLLER 3 B6053M192V TIMING BELT 2 CT023-101052-1 TIMING BELT 1 S473D13113 COMPRESSION COIL SPRING B 1 S473D13112 COMPRESSION COIL SPRING 5 50R0056000 O-RING VITON 6 1110-415967-11 PACKING,VITON T-20 1 CT012-002234-1 SOLENOID VALVE 1 027-001808-1 O-RING VITON V-300 BLK H560 5 022-000731-1 BEARINGS 2 0001S400010 SWITCH, MECHANICAL E/L 2 0001S400021 SWITCH, MICRO 16 0003BR0311 BEARING, 6000ZZ C3/SC 1 0003BR0367 BEARING, E/L, 6301ZZ/2AUI 4 000S40004 SWITCH, OVER-RUN, S/L 20 020-100893-1 SCREW, TRUSS HD, M2.6X6 SUS 8 023-100496-1 BELT, TIMING U-310T 14 027-100575-1 O-RING, RED SILICON 20 032-000158-1 WASHER, FLAT, M2.6, NARROW 7 07-100077-1 O-RING, RED SILICON 2 3BT0031021 BELT, TIMING, 100XL-037 8 3TB00401 BELT, TIMING, 130XL-037 2 3TB0051 BELT, TIMING 12 46F5622 RELAY, SS (DS2E-M-DC5V) 23 483-0017-1 RING, BONNET HOUSING RETAINING 150 50N6934 CLIPS, ADHESIVE BACKED LOCKING 10 50R00223 O-RING, G-25 28 61941 NUT, WING, 10MM BRASS FURNACE 83 92373A447 PIN, SPRING, 5/16"0X1"L, 302SS 6 92390A215 PIN, STAINLESS STEEL CLEVIS 49 92391A034 PIN, COTTER CLIP 8 CT-30-008024-1 CONN., SQUARE..SMS6P-1 8 CT030-008025-1 CONN., SQUARE ..SMS6R-1 7 CT030-80022-1 CONN,..SQUARE..SMS3P-1 5 CT0303-008023-1 CONN., SQUARE...SMS3-1 184 D-20-M8-1.25MM KNOB, D-20 W/M8X1.25MM FEMALE 45 H4-66M CAP, DUST, 60 SERIES 1 NAS1200-U32 VALVE, AIR SPEED 99 PD1M-10 NUT, M4 S/S KNURLED THUMB 4 PRMA1B12 RELAY, CP CLARE 17 QF25-100-C CLAMP, EVAC, NW 25, 4-LINK 1 SVTE35611 CORD, CONNECT 2 CT024-001538-1 SPEED CONTROLLER 400 D110508 SHIELD SCR (MATERIALS RES) 40 033-000252-1 NUT HEX M5BS MENIKNOB FSTNR 2 CT045-000019-1 FUSE GP20 4 023-100882-1 TIMING BELT 5 023-100669-1 BELT 10 027-100514-1 O-RING 13 027-000188-1 O-RING 50 020-003008-1 SCREW SET 52 CT027-100303-1 O-RING 7 CT310-411299-1 CYLINDER STOPPER 100 021-000291-1 PIN SPRING 10 0271-025051 O-RING 8 QF25-100-Q75 CLAMP, EVAC, NW25, 4-LINK 13 1SU0004000 LMT SWITCH 9 027-100745-1 O-RING,V-70,BLK,VITON 2 310-492476-1 STAY PIN (TOKYO ELECT) 8 027-101233-1 O-RING 2 028-000046-1 TUBE CONNECTION ARM 1 027-000093-1 O-RING 5 5801-10X10 COUPLING, E/L 2 3TB0006230 TIMING BELT 037-XL-0093A-J 6 386-400553-1 FLAT CABLE ASSY 1 386-440044-1 MAP SENSOR (TR) ASSY 5 B3027-002837-1 O-RING 1 1MG00205 GEAR, S/L, 2GK-15K 6 9033-SD505 O-RING, CHEMRAZ 2 CT018-001039-1 DRAWERS SLIDES 3 CT302-490037-2 LM SHAFT 4 M10-400128-2 PLATE SPACER 3 DSMX4-032680-D SCREW, VF MAGNETIC FLUID SEAL 1 00IMF00215 FAN, FURNACE, TOP 1 S473D12118 BUZZER PKB503AO 1 S473D12104 TRANSMISSION TYPE SENSOR E3N-2LRC4 2 RS-1000D LEAK SENSOR UNIT 1 281-601078-2 A.C. SWITCH (35427030188) 2 810-420967-2 CONNECTOR SUPPORT 3 1880-026855-11 MECHANICAL SEAL 1 100004954 COLD COIL 2 1208-001151-11 INDEXER (35427030097) 1 DS1110-312860-11 PARTITION,B 7 CT024-015960-1 AIR CYL.JDAS20x25-1332W 9 MX4032690E SCREW, VF M3X6IN CONEL 600 5 ES027-001794-1 O-RING 1 22110-324790-12 ASSY, TUBE, FLEX. 1/4" 3 035-002480-1 SWITCH, KEY (ASW22K20) 3 CT1910-422917-12 TUBE SUPPORT 1 1181-000058-11 PCB ASSY, FNC-ALM-D 2 MS61L DIFFERENTIAL PRESSURE SWITCH 22 027-000223-1 O-RING (PACK OF 10) 2 028-008029-1 FITTING FLANGED VP-2040-20 NW40 CENTER 2 810-420158-4 WAFER LIFTER 3 QF40-150-F-5 FLEX HOSE S/S THIN WALL QF 40 X 5 IN 3 QF25-100-F5 FLEX HOSE 10 MX-401229-OC QUARTZ, VF SIN TC PORT COVER 3 CT310-400135-3 DRIVE PULLY 1 027-101934-1 O-RING S-125 1 386-400554-1 FLAT CABLE ASSY 6 ES1D05-300152C11 COVER,BAFFLE,CESC 1 1MG0028 GEAR, S/L, 4GK-100K 3 CDJ1B15-45R CYLINDER, AIR, CHUCK ON/OFF, E 1 M85-300008-1 GATE LINK 2 ASSY 2 321-8-X-1DFR FLEX WELDMENT BARATR 2 CDJ1B15-45 CYLINDER FOR SUBTABLE 1 DS2193-824699-11 CABLE, WAFER COUNTER 1 401010491 MOTOR, GEAR, (LC-101C) 2 ES1D10-402043-11 SUPPORT S-PIPE 1 3LG0021 SLIDE UNIT, ELEVATOR ARM 1 CT036-0000491 SENSOR, CYLINDER, R801 1 593025 Z WIRE CABLE 5 1380-100514-11 DRIVE BELT IF-Y-22-0 43 WP-01/1000151 SENSOR, PIRANI HEAD 3 CT1981-609854-11 PCB USER BOARD SP610789 3 DSMX4-028620-A NUT, MAGNETIC FLUID SEAL KIT 3 DSMX4-032670-C SCREW, MAGNETIC FLUID SEAL 10 MT-405991-0A QUARTZ, VF STOPPER 1 051-000138-1 PANEL METER 2 027-001006-1 SEAL 5 1105-400182-11 COVER,TC PORT NITRIDE 10 CT2980-190501-11 FILTER, 10A 2 SS-4C-VCR-NE-1 VALVE, NUPRO SPECIAL 1 CT024-012102-1 AIR CYLINDER 2 024-011884-1 MANOMETER.FR51HV 0-20EP 2 220002501 BEARINGS 1 1386-448912-11 CABLE, MOTOR, EXT 7 110530060811 QUARTZ, VF SHUTTER 1 S473D13111 COUPLING ACRM-0756356 1 AB42-02-5 CYLINDER PUMP 2 MX3-024900-E CERAMIC PENCIL FOR TEL HTO. 2 413182-006 RING 1 MJ4085240 DRIVEN PULLEY 1 DS017-000074-1 TUBE,FLEX 2 CT310-428704-1 SENSOR BLOCK 3 012-001948-1 VALVE BALL.SS-42S4-1466 1 CT310-491265-4 MAIN ARM X ARM SUPPORT 1 IV10-361807-13 FARADAY, PIN INSULATOR 9 GP-2ARY-S SHIELD, CLEAR PLASTIC, GP-2ARY 2 MG-003207 VACUUM, INSERT, H-LPCVD 1 027-102424-1 O-RING 2 CT024-00738-1 ACTUATOR, CRIB 22 A128791 KIT,SHIELD SPUT3,200MM 4 1110-205669-11 INSULATOR,THERMAL,2 2 M10-402651-3 LOWER PLATE A 2 3874001641 SENSOR, THERMO 14 1110-409762-11 GASKET PTFE 3 850-9034 POWER,SUPPLY,24V,CTC 6 310-461746-3 NOZZLE,ARM 1 3816000903 SENSOR, BOARD, 6" LIMIT 5 810-420210-1 COLLAR 4- 5.6 28 ES027-002841-1 O-RING..FS, 1255-70, AS568-280, BLU 1 CT1381-647967-11 V2 C/S ARM X BOARD ASSY 2 386-400598-3 HEAD DOWN & ENG 28 ES027-101147-1 TIMING BELT 5 1110-409762 GASKET, TEFLON 3 DS040-000012 MOTOR, DRIVER 2 310-411131-1 SLIDE SENSOR 4 1105-400195-11 INJECTOR, #1 POLY 100MM 4 KR1075 RBLD KIT, TREBOR 75 SURG 1 000-PQF102-9 CABLE ASSY BLUE L=1930 34 PIN 4 D113813 ADAPTOR 2 RIT3-200 ROTARY ENCODER 1 2986-434506-W1 CABLE, #2, 2500, M3P-M3J 8 RH1LC20G-101-VB MOTOR, DC12V 1 310-390483-4 PANEL COVER 5 386-402175-2 M/C UNIT (2) CABLE 6 386-402174-2 M/C UNIT (1) CABLE 5 011-000928-1 VAC PUMP SEAL ISO 160 1 040-000908-1 MOTOR DRIVER, CSD5814N-D 2 DS1102-400063-11 MOTOR, UPX-534M-A 21 A113259 DISK, FORMAT 2 CT386-439280-4 CABLE MAIN ARM 2 MTR 1 036-100479-1 SENSOR FIBER OPTIC FEF-GHDEN 1 M86-400105-3 LOAD LOCK PRESSURE SWITCH 1 DS017-001413-1 TUBE,FLEX 1 DS2186-025201-12 CABLE, FLAT CP2N 1 1MT00397 MOTOR, E/L, ELEVATOR, MC588 2 M10-402650-3 UPPER PLATE B 1 CT2980-191554-11 STOPPER BLOCK ASSY 5 000PQF2782 PANEL, RELAY-> 2 OUTLET 1 CT386-400576-1 SENSOR, HARNESS,6"BELT UP&DOWN 1 GP-ISRY/26191 DIRECT BOX (GP-1SRY) 10 26054K4079 O-RING,KALREZ,027-001397-1 2 ES070-001980-1 DRIVER,TORQUE,20LTDK 1 386-401797-1 COOLING U/D SENSOR 8 341C0005-03 NOZZLE N2 360/70/80 8 5BV001054-NO VALVE, NO, FPR-71-6.35-NO 1 A120729 HEATER, ASSY, FRP, 150MM 3 CT310-426910-1 CHUCK, CROSS 1 501-00-78 PCB, FIRING BOARD 2 341C0001-01 NOZZLE FLUID FC-20 FAN SPRAY 3 5BV001039 VALVE 1 81F5087WA CABLE RIBBON 1 DS017-000077-1 TUBE,FLEX 11 DS2110-226738-11 HEATER,PANEL (3811) 2 CT2910-403787-12 PIN TEL ACT 8 DUV (ADH) 2 1187-041131-11 FLANGE END CAP ASSY, LPCVD REA 4 CT2910-390243-11 HHP TEFLON OVEN LID RAIL 5 93-4214 VALVE, KF-50, ANG, 3.15" MOD 2 CT024-007219-1 ACTUATOR 1 ME4-100860-D CLOTH BLOCK 1 810-220135-1 OUTER GATE 1 M85-000940-1 NEW,INDEXER,ELEVATOR,MOTOR 1 ES810-420062-1 SUPPORT, SHAFT, CLAMP 6 012-002146-1 SOLENOID (VJ3233 SMC) 1 024-014811-1 FILTER (MILLIPORE CWUZ160L1) 7 DS1110-434060-11 FITTING, OUTER, JOINT, NW100, FO 1 8A14-2005K CONTROL PCB 26 D122081 SHIELD, PIEPAN, SPUT3, 200MM, SS 1 1381-659042-13 FIRE SIGNAL RELAY BOARD 3 HPS-109 PIPING P-D-POLY 10 CT036-100305-1 SENSOR,PRESSURE,PS5-102V 5 100004911 KIT, SEAL SET, NW-50, HF-D-POL 5 10007133 KIT, INT REBUILD, 80HV, VF, MK 8 501-00-15 BOARD, SEMY GIF, SAFETY 11 321-4-X-18-B1 TUBING, 1/4X18 321 SS FLEXIBLE 2 CT1386-435554-11 SENSOR, I/F BOARD 1 380-000060-2 POWER SUPPLY 8 1880-26785-21 AMORPHOUS CARBON 1 CT31386-443496-12 SENSOR, MA8 THETA BP 4 1386-435346-11 SENSOR ASSY, PHOTO 2 DF-A4201NRP FILTER ASSY, DISPOSABLE 8 810-420129-1 BAFFLE 1 810-320069-1 BAFFLE 9 ES027-003178-1 ORING 2-272 ARMOR CRYSTAL A60 10 CT012-003168-1 VALVE:RESIN.AMD01-X53 2 043-000148-1 HEATER, MANTLE NCP-6 1 152-004OK VALVE PNEU NW40 2 CT012-000113-1 VALVE,RESIN..PDT-5C1 1 DS1187-003566-11 JIG CTL, TM-1200TEMP 2 386-439753-1 MOTOR ASSY 1 012-002528-1 3-WAY VALVE 1/4 OD 3 CT2985-404098-14 BOWL COT SET 1 CT012-000115-1 VALVE, BACK, SUCK PDT-5S1TM 2 A120729 HEATER, ASSY, FRP, 150MM 3 381-642664-1 UIO/BS CONN. BOARD 2 DSME4-079090-A FLEXIBLE COUPLER 4 4815000915 PCB, TSBX, S10 1 501-01-34 PCB 1 2986-419545-W1 CABLE, #2, 3000, M3P-M3J 8 QF80-300-MH8.75 PIPING, FLEXIBLE, THICK WALL, 1 1386-443501-13 3P MA8 Z MOTOR CABLE 1 CT381-632910-2 BOARD, E UTILITY 1 501-01-47 PCB, BOAT LOADER INTERFACE 11 310415683-1 CENTERING WAFER 1 ML9002713A X-AXIS FLAT CABLE 1 1D86-004229-13 CABLE,PC,PC2,BTM.PANEL 1 385-332650-4 DIP DEP POSI DEV BACK RINSE 2 385-400083-2 ASSY., STOP PIN, RIGHT HAND 4 410-217029-1 COMB, TRANSFERS 7 501-01-35 PCB, EXTERNAL DIGITAL INPUT BOARD 1 ML9002720B Z-AXIS FLAT CABLE 1 381-600209-C ALARM ANALYZER I/0 BOARD 1 VZ1120 VALVE, SOLENOID, VZ1120 3 387-432268-2 RAIL IN SENSOR, ROLLER, 6" 3 L25-YA54 CABLE, T.C. 1 853-S034052-001 RF ATC MOTOR CABLE 3 012-000724-1 VALVE 1/4 OD 2 520R-40RJ100 PANEL, PRINTER 1 310-346181-2 THERMO CONNECTOR NOZZLE 1 ES1A80-1016700-11 SERVICE BOX, Z-610PC-BNNN 2 DS1110-327033-11 INSULATOR, HEAT 6 MSA-6-27 QUARTZ ENDLID (TEMP, PROFILE) 1 120011561 CONTROLLER, PRESSURE 1 2986-419594-W1 CABLE, 4000, M4P-M3J 1 1110-403568-11 LABYRINTH, OUTER 3 1386-448385-11 M/A HSY MOTOR ASSY 2 1386-448386-11 ASSY SPRING 1 MR-3020 BOARD, CIRCUIT 1 027-63-600-4 PUMP MOTOR 2 000PQF2781 PANEL, 4 OUTLET DISTRIBUTION 32 CT1985-316162-16 QT BOTTLE CAP ASSY 1 802050C BOARD, CIRCUIT 1 380-100028-2 SHUTTER ROTARY SOLENOID UNIT 2 80-2060A BOARD, CIRCUIT 3 QF80-300-MH10 BELLOWS, QF80, TEN INCH LENGTH 1 MEX11 BOARD, CIRCUIT 1 2040-000228-1 MOTOR DRIVER, AK-BK551C 2 PCB1B0011 PCB, RELAY 1 BC-701A BOARD, CIRCUIT 1 MC-2090C BOARD, CIRCUIT 1 1810322489-12 CERAMIC FOCUS RING 3 HFR900-W-3P-4527 REGULATOR, AIR 3 DS2185-025477-11 CLAMP, QUARTZ WARE CONNECTION 1 CT386-439159-4 ARM-2 SCAN CYLINDER 36 MSA-6-24 QUARTZ BOAT TABLE 4 D121428 HOUSING, WAFERHOLDER 200MM 3 CT2910-300050-11 ASM 6" PINCETTE 2 CT2980-090370-11 BOARD,OVEN,I/O,TKB2120 1 FM-3700D MFM, AERA 500SCCM NH3 2 S473D12111 DC POWER SUPPLY (12V) 2 780-05155-200 KIT,GEM/SECS II,V2.0,81XX 1 385-390646-8 MIST TRAP ASSY 1 036-002348-1 AMPLIFIER, PHOTO ELECTRIC 1 1PS0031810 POWER SUPPLY(SD-21A),FOR(BE-727) 1 1PS0019890 MFC POWER SUPPLY 1 QA-11064-5 PCB, 2200, QA-11064-5 2 DS481-501620-9 PCB, I/O, COUNTER 1 SML-3P BOARD, CIRCUIT 2 BBB-06A PCB ASSY 10 DS2110-338371-11 PIPING 80A (810-52103R) 70 A121392 LATCH, ASSY, COMPLETE 200MM 1 1110-202828-11 INSULATOR, 1 THERMAL 9 WG3NS2RR2 FILTER, GAS, 1/4" VCR, NF MINI 2 AB41-03-5 VALVE SOLENOID 1 C-PRM-1 PCB, 2200, C-PRM-1 1 501-01-18 AMPLIFIER, TC TYPE R 5 E5CS-Q1PX-F CONTROLLER, TEMP 43 D119450 DOOR CORNER SHIELD 2 ES1D10-303356-11 CASSETTE CHAMBER VACUUM PIPE 1 810-321139-1 GUARD RING 1 015-005382-1 METER MASS FLOW 1 S114L13002 GLASS ROD 2 APC-DRIVER POWER SUPPLY 1 C-SEQ-1 PCB, 2200, C-SEQ-1 2 DSME3-056810-D RING, INNER, INCONEL 2 1110-317798-11 HEAT INSULATOR 1 S473D22100 DC MOTOR CL2A12 G30 1 118500102111 TRAP, VF, INNER ASSY. 6 2105-220155-11 COVER,PEDESTAL GATE 7 CT2985-486378-W1 CU,SOG,COVER,LHP,RH 2 AZ4052060 MKS,290,ION,GAUGE CONTROLLER 10 D125408-150SP SHLD,W/H,SPUT,ICC,PLAS SPRY 8 810-320068-1 BAFFLE H 4 400002121 CONTROLLER, PMD-51, ELEVATOR S 2 DSMX3-042110-A SPACER, TEFLON PTFE 2 CT2910-401756-11 BLOCK,(PI),8"WAF 3 D125243-SP SHLD RING,GAS DIST,PLAS,ICC 4 DS024-012687-1 FLOW METER 6 5022290 ACTUATOR,ROT,AIR,1" 2 ES039-001953-1 BATTERY R2, AC BOX 2 886-422434-2 STEPPING MOTOR DRIVER 1 DS1181-000257-16 PCB,ASSY,MC-31043A 1 1386-450008-11 HEATER ASSY 1 DS2110-324793-12 FLEX TUBE(S1H2CL4) 2 1187-040427-12 DRIVER, HF, AUTOSHUTTER 2 DS2110-425611-11 SIC RING 2 1185-001969-11 FLANGE MOUNTING PANEL, LPCVD R 7 MC-31151 PCB ASSY, TS4000BRD SET TP858 2 D125243-SP SHLD RING,GAS DIST,PLAS,ICC 3 CP8000A PC BOARD ASSY 4 CP8321A PCB 1 M81-600491-5 8 CHANNEL ANALOG I/O BOARD 2 381-600222-9 OVEN CONNECTION BOARD 4 381-639178-3 AC SERVO CONTROL BOARD 1 CT1910-427600-11 ENCODER SLIT 2 310-492474-1 HINGE PLATE (TOKYO ELECT) 1 1885-020003-12 B. E. (6") ASSY 6 AZA100273 BELLOWS,COVER,FRONT 1 CT051-000370-1 SENSOR, THERMO 1 DS2187-073966-13 TUBE ASSY 4 ES1D10-190477-TM BASE,DEPO SHIELD SUPPORT, E 2 A21187-027556-13 FURNACE MONITOR, M-120 TYPE 1 BE-737-PMC-A PC BOARD ASSY 2 DS1181-000056-14 PCB ASSY,FNC-ALM-A2 1 DS1187-001397-13 CONTROLLER, HEC PYRO 1 DS1181-000057-12 PCB, FNC-ALM-B2 16 CT024-016636-1 FILTER,WGFA40HP1 261 D121429 TAB RING, WAFER HOLDER, 200MM 4 CP-8090A PC BOARD ASSY 1 CP-8000-1MB PC BOARD 1 5-4696-310A PCB 5 ES027-003819-1 O-RING (AS-568A-393) 1 DS2181-020011-15 PCB ASSY STC-I/O 4 DS1187-061375-11 GAS LINE, VF CLF3/SIH4 FLEX 2 DS012-001050-1 VALVE,VAC,152-0080P 3 DSF-000002-6 STRAP, DIFF. SUPER RING (PQK-5) 1 992-40270 CHUCK ETCHER 1 1110-317852-12 HEATER INSULATING 1 1181-000317-14 PCB ASSY 1 111020838012 PANEL HEATER 110-208380-12 2 A128789 KIT,SHIELD,SPUT1,RM-12,TIW 2 DS1187-030884-1A M121 TEMP CONTROLLER ASSY 1 1810-120531-13 ELECTRODE, UPPER 1 DS1181-000174-14 PCB, 80-2040B 2 CT2980-190226-11 DRIVER,MOTOR,Y 1 CP-8090 BOARD 1 381-639378-3 STAGE TERMINAL BOARD ASSY (COATER MARK V) 2 023-001661-1 TRANSFER SYSTEM, BR940166 BLOCK 2 ES1D81-000098-B4 BRD, ASSY, TYB112-B/DIO 17 CT2980-091455-12 SENSOR,MAPPING LED NP8067D200-3 2 881-621180L RF-C ANAOLG BOARD 1 CT2980-191555-11 TORQUE MOTOR THETA MEGA 1 CT381-500242-B BOARD, CPU # 2 6 ES1D10-200705-14 UPPER, ELECTRODE, 1, (DRM2) 1 1810-323881-13 FOCUS INNER RING 1 ES1D05-300052-11 RING INSULATOR A7 1 S114L11031 PUMP CAVITY W/ ROD & LAMP 3 1810-322531-12 RING,GUARD [8K-ESC] 1 1181-00211-12 PCB ASSY 1 1810-221471-14 ELECTRODE CRYSTAL 2 ES1D10-100670-13 ELECTRODE UPPER QB FLAT 21 ES027-002988-1 O-RING, CHEMRAZ59, AS568A-394, WH 2 CT2980-090371-11 BRD,MOTOR,I/O,TKB2130 29 ES1D10-312197-11 RING, FOCUS, (C-ESC 4.0MM SIC) 1 2105-120178-11 TUBE, PROCESS, A858 2 012-004692-1 VALVE, MAIN, VF, MKS (93-1297) 1 853-S034055-010 RF MATCHING BOX FINE CABLE 2 DS012-005080-1 VALVE,VAC.IVBH25CA-NWF-12-SC 1 853-S034050-010-01 RF ATC POWER SUPPLY CABLE 13 ES1D10-308722-11 RING, FOCUS, SEASONED 9 ES1D10-101446-22 PLATE,BAFFLE 0-12(DRM2) 1 PMP2A0032 PUMP, RCRC GAMA HF/UCLEA 2 DS1105-200622-11 COVER, PEDESTAL SIC+CVD A851 NITRIDE 1 2185-027393-11 ASSY,MANIFOLD UNIT,R.