Used RUDOLPH Auto EL III-2 #9124204 for sale
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ID: 9124204
Ellipsometer
633 HeNe laser source
4A option
X/Y stage with slide tray wavelengths of 405nm <1A or 1%
(whichever is greater)
Repeatability.
RUDOLPH Auto EL III-2 is a cutting-edge ellipsometer, designed for precision measurement capabilities, built to enhance overall productivity and reliability. An ellipsometer is a type of optical instrument that measures the reflectivity and/or polarization of light that is reflected off a surface. Auto EL III-2 ellipsometer includes many complex components, including four precise mirrors and rotating polarizers, a highly capable spectrometer, rotation angle encoders, a high-grade light source, and a specialized controller. The instrument has a wide spectral range operation from 250 to 1700 nm. The light source allows for both incident angle and polarization measurements without the need for a sample stage. RUDOLPH Auto EL III-2 is a stand-alone instrument, meaning data can be taken autonomously. It also has the capability to be integrated into a production line, allowing for measurements and control feedback. The first mirror travels rotatably, mounted on an adjustable "Dome". This vibration-damping mounting technique allows for the highest quality measurements. The two polarizers rotate in unison; one mounted on an extra robust spindle with micron-precision, and the other mounted on an ultra-precise bearing. The two slits also rotate in unison, all three elements in unison controlled by the internal power controller and the software. The three rotation angles - sigma, psi, and delta - are measured precisely with dedicated and absolute encoders and then passed to the data acquisition software. The received light is established by two advanced optical spectrometers; a series of top-grade 10 micron slits allowing a direct connection with an optical CCD or an array of optical detectors. The spectrometers have a wide spectral range and are designed for both absolute radiant intensity measurements and incident angle measurements in one single operation. The data acquisition from the incident optical systems is processed when Auto EL III-2 ellipsometer is in operation mode. The software is designed to control all the components and features quality assurance checks when in the system's operation mode, and records all results in a traceable way. Furthermore, the software can be customized and integrated to existing production lines. All in all, RUDOLPH Auto EL III-2 ellipsometer is an incredibly precise instrument, designed to make the most complex measurements. Its cutting-edge features and reliable components aid in achieving high-quality results with maximum accuracy and repeatability. The included software and data acquisition protocols, as well as the ability to integrate with production lines, make Auto EL III-2 an ideal choice for any lab or engineering task requiring precision.
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