Used RUDOLPH AUTO EL III #293639189 for sale

Manufacturer
RUDOLPH
Model
AUTO EL III
ID: 293639189
Wafer Size: 6"
Ellipsometer, 6" 1995-1996 vintage.
RUDOLPH AUTO EL III is an automated, precision ellipsometer designed for use in a variety of industrial applications. Ellipsometry is the study of the polarized intensity of light reflected from a surface, which is a measure of the optical properties of the surface. RUDOLPH AUTOEL III ellipsometer measures the film thickness and optical constants of on-wafer structures, transparent and opaque thin-film structures, and other related samples. AUTO EL III is equipped with a user-friendly, Automated Measurement System (AMS) designed for automation sequencing, which allows for the simultaneous measurement of multiple samples. It can store up to 50 different states or parameter combinations, allowing the operator to switch quickly and easily between different measurement states. AUTOEL III includes a Sample Bucket system, which can accommodate up to 10 samples at once and has a sample changer mechanism that can move samples from the sample bucket to the analysis slots. This allows for faster and more efficient sample analysis. RUDOLPH AUTO EL III features a precision research-grade light source and detector, mounted on a manually-alignment system. This allows the operator to easily adjust light intensity, detector sensitivity, and sample-to-detector distance. RUDOLPH AUTOEL III also includes various pre-set parameters, allowing for different measurements to be taken with just the push of a button. It also allows for the measurements to be programmed for custom applications. AUTO EL III ellipsometer has the ability to measure optical-constants of the sample material (dielectric), film thickness, optical anisotropy, refraction index, extinction coefficient, and surface roughness. It can also be used for advanced applications such as surface-relief analysis and can be used to characterize complex structures such as plasmonic waveguides. AUTOEL III is a robust and reliable instrument that provides accurate data and measurements in a short amount of time. It is ideal for a variety of industrial applications, including semiconductor and optics, optical component analyses, opto-electronic device characterization, and quality control. RUDOLPH AUTO EL III provides high-precision, high-speed measurements, allowing for higher throughput and increased productivity.
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