Used RUDOLPH AUTO EL III #293660700 for sale
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ID: 293660700
Vintage: 1984
Ellipsometer
(2) Focusing lens
Focusing lens motor
Wafer carrier
1984 vintage.
RUDOLPH AUTO EL III is an automated ellipsometer designed for accurately measuring thin film properties with precision and stability. It is the latest version of the renowned RUDOLPH Auto EL series, and it provides users with a fast, reliable and easy-to-use instrument. The instrument comprises a short-coherence optical microscope, a high-precision goniometer, and a highly-sensitive photodetector. The patent-pending rotary goniometer at the heart of this instrument offers excellent resolution and precise angular measurements. It offers wide-ranging flexibility for measuring various optical properties including reflectance, refraction and absorption. The high-resolution microscope, attached to the goniometer, is used to precisely image the surface of the sample. Further, the internal photodetector measures the intensity of the light returning from the surface thus giving information about the thin film properties of the sample. RUDOLPH AUTOEL III is equipped with a touchscreen display, which allows operators to easily and quickly access data and adjust parameters. The instrument's software library makes it possible to acquire various data sets such as spectra, ellipsometric diagrams, reflectivity data, Tauc-Lorentz data, layer thickness, and deposition parameters. The innovative and easy-to-use design of AUTO EL III makes it an ideal choice for a wide range of applications, including thin film characterization and deposition. Furthermore, the instrument also offers high-level precision and repeatability, ensuring that users get accurate and reproducible results. It is the perfect choice for thin-film research and product development, industrial process control, material analysis, and more.
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