Used RUDOLPH AUTO EL #9221065 for sale

RUDOLPH AUTO EL is an automated, easy-to-use ellipsometer designed for ultra-precise and reproducible optical thin film characterizations. Ellipsometers measure the change in polarization of monochromatic light when it passes through thin film-related material. RUDOLPH AUTOEL allows rapid real-time metrology of optical thin films while also providing thickness mapping capabilities across an entire wafer. With its intuitive and easy-to-use interface, AUTO EL's three-axis motorized rotation stage allows fast measurements for both two- and three-dimensional mapping of layers. The ellipsometer is capable of measuring a wide range of optical materials, including oxides, nitrides, and resist layers, and it can accurately characterize both up to 10-μm thick layers and up to 200-nm films. Additionally, the system is equipped with automated photometric imaging tools that automatically track the sample and adjust the optical position of the measurement head for accurate reflection or transmission mode measurements. In terms of accuracy, AUTOEL offers extremely high repeatability and repeatability up to 4-5%. Furthermore, its auto-focusing feature utilizes an optimized optic package to ensure the highest accuracy of each image, allowing precise depth profiles with sub-nm resolution. For additional ease of use, the system integrates seamlessly with RUDOLPH Autoloader AL100-C - a five-slot, automated, motorized load station - for full automation and concurrent measurements. This allows users to quickly start multi-site measurements without any manual loading. Overall, RUDOLPH AUTO EL is an excellent choice for laboratories requiring precise, reproducible optical thin film characterizations. With its automated loaders and excellent accuracy, it is an invaluable tool for both research and quality control.